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- W162852657 abstract "We present a complete fabrication process and measured results for InP based HEMTs and MMICs. A major effort has been focused on the development of new and reliable gate and via-hole process both for InP based HEMTs and MMICs. A single exposure is required to define both the footprint and the head of the T-gate by modulation of the exposure doses. The developed gate and via-hole process is reliable and suitable for volume production of InP-HEMTs and MMICs with high yield. A complete MMIC chip includes mesa resistors, microstrip transmission lines, HEMT transistors, and ground via holes. A cutoff frequency fT of 100 GHz and maximum oscillation frequency fmax of 200 GHz was obtained from 0.1 um gate lattice matched AlInAs/GaInAs/InP based HEMTs." @default.
- W162852657 created "2016-06-24" @default.
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- W162852657 date "1999-10-01" @default.
- W162852657 modified "2023-09-27" @default.
- W162852657 title "A new reliable fabrication-process for InP based HEMTs and MMICs with gate length from 0.06 to 0.2 um" @default.
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