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- W1630707033 abstract "Abstract : Double-crystal x-ray rocking curves and topographs have been used to study the relief of strain produced by pulsed laser annealing in 28Si+ ion- implanted GaAs. X-ray rocking curves of 140 keV 2 x 1014/cm2 as-implanted GaAs indicated that the upper 2500 angstroms of the sample had been strained to a maximum of 0.38. Rocking curves from two of a single-shot laser anneal sites with the highest energy densities (and largest areas of annealing) indicated that the ion-implantation strain had been almost completely relieved. X-ray rocking curves of the 180 keV 5 x 1015/cm2 as-implanted GaAs revealed that the surface of the sample has been strained to a depth of 6000 angstroms with a maximum strain of 0.50%. Rocking curves from rastered laser anneal sites indicated that considerable strain remained in the sample." @default.
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- W1630707033 date "1991-01-08" @default.
- W1630707033 modified "2023-09-27" @default.
- W1630707033 title "Double-crystal x ray diffraction studies of Si ion-implanted laser-annealed GaAs" @default.
- W1630707033 hasPublicationYear "1991" @default.
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