Matches in SemOpenAlex for { <https://semopenalex.org/work/W1630852490> ?p ?o ?g. }
Showing items 1 to 73 of
73
with 100 items per page.
- W1630852490 abstract "Abstract : The goal of the workshop was to bring together government, industrial and university representatives to assess the progress and future direction of in situ processing of semiconductors. Since the first NATO Workshop in this topic area (Cargese, Corsica in 1987) there has been surprising progress toward the industrial applications, particularly as exemplified by cluster tools and laser/ion beam real-time fabrication machines. The consensus of the workshop was that the economic implications of in situ processing are accelerating strongly, particularly for smaller countries(or even larger ones) where the costs of traditional semiconductor factories are growing at unacceptable rates. This problem and the potential solutions were the central themes of the conference. The talks by Larrabee, Saraswat and Prabhakar pointed to the need for future factories that are smaller and use flexible intelligent manufacturing. In semiconductor device manufacturing, in particular, smaller lots, cluster tools (i.e. in-situ processing), and tight process control will result in better contamination control and lower cost. The other talks of the conference provided specified examples of advances in in-situ processing that will contribute to making this vision of intelligent flexible manufacturing a reality." @default.
- W1630852490 created "2016-06-24" @default.
- W1630852490 creator A5076026607 @default.
- W1630852490 date "1992-08-31" @default.
- W1630852490 modified "2023-09-28" @default.
- W1630852490 title "Organization of Workshop on Emerging Technologies for In-Situ Processing" @default.
- W1630852490 hasPublicationYear "1992" @default.
- W1630852490 type Work @default.
- W1630852490 sameAs 1630852490 @default.
- W1630852490 citedByCount "0" @default.
- W1630852490 crossrefType "journal-article" @default.
- W1630852490 hasAuthorship W1630852490A5076026607 @default.
- W1630852490 hasConcept C111919701 @default.
- W1630852490 hasConcept C117671659 @default.
- W1630852490 hasConcept C119599485 @default.
- W1630852490 hasConcept C127413603 @default.
- W1630852490 hasConcept C138885662 @default.
- W1630852490 hasConcept C154945302 @default.
- W1630852490 hasConcept C160671074 @default.
- W1630852490 hasConcept C164866538 @default.
- W1630852490 hasConcept C199360897 @default.
- W1630852490 hasConcept C207267971 @default.
- W1630852490 hasConcept C2775924081 @default.
- W1630852490 hasConcept C2778137410 @default.
- W1630852490 hasConcept C2987263936 @default.
- W1630852490 hasConcept C41008148 @default.
- W1630852490 hasConcept C41895202 @default.
- W1630852490 hasConcept C66018809 @default.
- W1630852490 hasConcept C98045186 @default.
- W1630852490 hasConceptScore W1630852490C111919701 @default.
- W1630852490 hasConceptScore W1630852490C117671659 @default.
- W1630852490 hasConceptScore W1630852490C119599485 @default.
- W1630852490 hasConceptScore W1630852490C127413603 @default.
- W1630852490 hasConceptScore W1630852490C138885662 @default.
- W1630852490 hasConceptScore W1630852490C154945302 @default.
- W1630852490 hasConceptScore W1630852490C160671074 @default.
- W1630852490 hasConceptScore W1630852490C164866538 @default.
- W1630852490 hasConceptScore W1630852490C199360897 @default.
- W1630852490 hasConceptScore W1630852490C207267971 @default.
- W1630852490 hasConceptScore W1630852490C2775924081 @default.
- W1630852490 hasConceptScore W1630852490C2778137410 @default.
- W1630852490 hasConceptScore W1630852490C2987263936 @default.
- W1630852490 hasConceptScore W1630852490C41008148 @default.
- W1630852490 hasConceptScore W1630852490C41895202 @default.
- W1630852490 hasConceptScore W1630852490C66018809 @default.
- W1630852490 hasConceptScore W1630852490C98045186 @default.
- W1630852490 hasLocation W16308524901 @default.
- W1630852490 hasOpenAccess W1630852490 @default.
- W1630852490 hasPrimaryLocation W16308524901 @default.
- W1630852490 hasRelatedWork W1123911279 @default.
- W1630852490 hasRelatedWork W1550700646 @default.
- W1630852490 hasRelatedWork W1601933888 @default.
- W1630852490 hasRelatedWork W1965483398 @default.
- W1630852490 hasRelatedWork W2004846068 @default.
- W1630852490 hasRelatedWork W2067154743 @default.
- W1630852490 hasRelatedWork W2135937614 @default.
- W1630852490 hasRelatedWork W2145752444 @default.
- W1630852490 hasRelatedWork W2203234388 @default.
- W1630852490 hasRelatedWork W2492002313 @default.
- W1630852490 hasRelatedWork W2548099441 @default.
- W1630852490 hasRelatedWork W2766683009 @default.
- W1630852490 hasRelatedWork W2897491336 @default.
- W1630852490 hasRelatedWork W2954123599 @default.
- W1630852490 hasRelatedWork W3009930713 @default.
- W1630852490 hasRelatedWork W3195875606 @default.
- W1630852490 hasRelatedWork W385822492 @default.
- W1630852490 hasRelatedWork W621430747 @default.
- W1630852490 hasRelatedWork W2403619292 @default.
- W1630852490 hasRelatedWork W2405497117 @default.
- W1630852490 isParatext "false" @default.
- W1630852490 isRetracted "false" @default.
- W1630852490 magId "1630852490" @default.
- W1630852490 workType "article" @default.