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- W1631308377 abstract "This paper presents the fabrication processes for micromachined millimeter wave devices on micromachined GaAs substrates. The 2.2 /spl mu/m thin GaAs/AlGaAs membrane, obtained by MBE growth and micromachining of semi-insulating GaAs, is used as support for millimeter wave filter structures. Cascaded coplanar waveguide open-end series stubs filter type structures, with central frequencies of 38 and 77 GHz, as well as monolithic integrated millimeter wave receivers were designed and manufactured on GaAs micromachined substrates." @default.
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- W1631308377 date "2003-06-26" @default.
- W1631308377 modified "2023-09-26" @default.
- W1631308377 title "GaAs micromachining for millimeter wave applications" @default.
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- W1631308377 doi "https://doi.org/10.1109/smicnd.2002.1105793" @default.
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