Matches in SemOpenAlex for { <https://semopenalex.org/work/W1633422234> ?p ?o ?g. }
Showing items 1 to 65 of
65
with 100 items per page.
- W1633422234 endingPage "2343" @default.
- W1633422234 startingPage "2335" @default.
- W1633422234 abstract "Pressure and input power dependence of inductively coupled plasma systems was investigated with the gas systems used for the chemical vapor deposition of metals and metal nitrides; H2, N2, Ar, and the H2/Ar and N2/H2 mixtures. The plasma density and the electron temperature were measured with a Langmuir single probe and the ionic species in the plasma were analyzed with a quadrupole mass spectrometer. The plasma density of Ar plasma measured 11 cm below the rf coil was in the 1017 m−3 range, which is about 1 order of magnitude higher than N2 plasma and 2 orders of magnitude higher than the H2 plasma. Capacitively coupled power transfer was observed for H2 and N2 plasmas when the plasma density was below about 2×1015 m−3. When the plasma density increased effectively with increasing pressure and input power while the electron temperature was independent of the input power. In the high pressure regime, the plasma density showed saturation in H2 and N2 plasmas and even decrease in N2 plasma. With an appropriate addition of Ar to the H2 plasma (H2/Ar plasma), the plasma density increased greatly and thus the production of atomic hydrogen was enhanced. In N2/H2 plasma, the plasma density changed little over a wide range of gas mixing ratio but the concentration of atomic nitrogen was decreased abruptly as the portion of H2 increased while the concentration of atomic hydrogen remained high even when the portion H2 was small." @default.
- W1633422234 created "2016-06-24" @default.
- W1633422234 creator A5041501747 @default.
- W1633422234 creator A5071495406 @default.
- W1633422234 date "2001-09-01" @default.
- W1633422234 modified "2023-10-16" @default.
- W1633422234 title "Pressure and input power dependence of Ar/N2H2 inductively coupled plasma systems" @default.
- W1633422234 cites W1486704247 @default.
- W1633422234 cites W1963495660 @default.
- W1633422234 cites W1964958598 @default.
- W1633422234 cites W1980234811 @default.
- W1633422234 cites W1992529528 @default.
- W1633422234 cites W2003551955 @default.
- W1633422234 cites W2017474020 @default.
- W1633422234 cites W2030286479 @default.
- W1633422234 cites W2036194370 @default.
- W1633422234 cites W2063374909 @default.
- W1633422234 cites W2080126147 @default.
- W1633422234 cites W2139034438 @default.
- W1633422234 doi "https://doi.org/10.1116/1.1385904" @default.
- W1633422234 hasPublicationYear "2001" @default.
- W1633422234 type Work @default.
- W1633422234 sameAs 1633422234 @default.
- W1633422234 citedByCount "17" @default.
- W1633422234 countsByYear W16334222342013 @default.
- W1633422234 countsByYear W16334222342014 @default.
- W1633422234 countsByYear W16334222342015 @default.
- W1633422234 countsByYear W16334222342016 @default.
- W1633422234 countsByYear W16334222342019 @default.
- W1633422234 countsByYear W16334222342020 @default.
- W1633422234 countsByYear W16334222342021 @default.
- W1633422234 crossrefType "journal-article" @default.
- W1633422234 hasAuthorship W1633422234A5041501747 @default.
- W1633422234 hasAuthorship W1633422234A5071495406 @default.
- W1633422234 hasConcept C121332964 @default.
- W1633422234 hasConcept C185544564 @default.
- W1633422234 hasConcept C185592680 @default.
- W1633422234 hasConcept C82706917 @default.
- W1633422234 hasConcept C95974651 @default.
- W1633422234 hasConceptScore W1633422234C121332964 @default.
- W1633422234 hasConceptScore W1633422234C185544564 @default.
- W1633422234 hasConceptScore W1633422234C185592680 @default.
- W1633422234 hasConceptScore W1633422234C82706917 @default.
- W1633422234 hasConceptScore W1633422234C95974651 @default.
- W1633422234 hasIssue "5" @default.
- W1633422234 hasLocation W16334222341 @default.
- W1633422234 hasOpenAccess W1633422234 @default.
- W1633422234 hasPrimaryLocation W16334222341 @default.
- W1633422234 hasRelatedWork W1531601525 @default.
- W1633422234 hasRelatedWork W1998010466 @default.
- W1633422234 hasRelatedWork W2384464875 @default.
- W1633422234 hasRelatedWork W2606230654 @default.
- W1633422234 hasRelatedWork W2607424097 @default.
- W1633422234 hasRelatedWork W2748952813 @default.
- W1633422234 hasRelatedWork W2899084033 @default.
- W1633422234 hasRelatedWork W2948807893 @default.
- W1633422234 hasRelatedWork W4387497383 @default.
- W1633422234 hasRelatedWork W2778153218 @default.
- W1633422234 hasVolume "19" @default.
- W1633422234 isParatext "false" @default.
- W1633422234 isRetracted "false" @default.
- W1633422234 magId "1633422234" @default.
- W1633422234 workType "article" @default.