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- W1633451353 abstract "This paper deals with optical emission spectroscopic studies of low pressure (p=0.1⇒0.5 mbar) Ne–N2 capacitively coupled radio frequency (rf) plasma that can be used for plasma nitriding, etc. It reports the methods to calculate the electron temperature (Te) in nonthermal plasmas. Since, the selected Ne I lines, used to calculate electron temperature, are found in corona balance; therefore, it allows us to use modified Boltzmann technique to calculate electron temperature. Langmuir probe is also used to calculate electron temperature and electron energy distribution functions (EEDFs). The measurements are worked out for different discharge parameters like neon percentage, filling pressure and RF power. It is found that electron temperature increases with the increase in neon percentage and decreases with the increase in pressure, whereas excitation temperature (Texc) increases with power, neon percentage, and decreases with pressure. It is also observed that electron temperature measured by Langmuir probe technique is slightly greater than the one measured via modified Boltzmann plot method. The tails of the EEDFs gain height and extend toward the higher energy with the increase in neon percentage in the mixture." @default.
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- W1633451353 date "2008-12-15" @default.
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- W1633451353 title "Characterization of nonthermal Ne–N2 mixture radio frequency discharge" @default.
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- W1633451353 doi "https://doi.org/10.1063/1.3021356" @default.
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