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- W1633606757 abstract "Abstract : During this funding period, the work focused on the heteroepitaxial growth, doping, and characterization of GaN by the ECR-MBE method. Nitrogen-ECR plasmas were investigated by Optical Emission Spectroscopy. Work was also initiated in the growth of AlN. In the area of GaN growth on (0001) sapphire, we identified ECR-plasma conditions to grow the material in the layer-by-layer growth mode to a layer-by-layer growth followed by an island growth mode. Such films were grown in semi-insulating form (p equal or approx. 10(exp 12) omega(dot)cm) and doped p- and n-type with Mg and Si at the level of 10(exp 19) cm(-3). RIE of GaN using CCl2F2 and CF3Br/Ar as well as Ohmic contacts to n-GaN were developed. Defects in the films were characterized by photoluminescence and EPR studies. Initial studies of AlN growth indicate that the material can grow in the single crystal form at temperatures comparable to that of GaN.... Gallium Nitride, Aluminum Nitride, N-doping, P-doping, Molecular Beam Epitaxy, Electron Cyclotron Resonance source) Ohmic photoluminescence, Conduction electron spin." @default.
- W1633606757 created "2016-06-24" @default.
- W1633606757 creator A5013915463 @default.
- W1633606757 date "1993-05-30" @default.
- W1633606757 modified "2023-09-27" @default.
- W1633606757 title "Growth and Doping of Al(x)Ga(1-x)N Films by Electron Cyclotron Resonance Assisted Molecular Beam Epitaxy" @default.
- W1633606757 hasPublicationYear "1993" @default.
- W1633606757 type Work @default.
- W1633606757 sameAs 1633606757 @default.
- W1633606757 citedByCount "0" @default.
- W1633606757 crossrefType "journal-article" @default.
- W1633606757 hasAuthorship W1633606757A5013915463 @default.
- W1633606757 hasConcept C110738630 @default.
- W1633606757 hasConcept C113196181 @default.
- W1633606757 hasConcept C120665830 @default.
- W1633606757 hasConcept C121332964 @default.
- W1633606757 hasConcept C138230450 @default.
- W1633606757 hasConcept C171250308 @default.
- W1633606757 hasConcept C175361016 @default.
- W1633606757 hasConcept C185592680 @default.
- W1633606757 hasConcept C187961010 @default.
- W1633606757 hasConcept C19067145 @default.
- W1633606757 hasConcept C192562407 @default.
- W1633606757 hasConcept C194760766 @default.
- W1633606757 hasConcept C2778871202 @default.
- W1633606757 hasConcept C2779227376 @default.
- W1633606757 hasConcept C2780064504 @default.
- W1633606757 hasConcept C3792809 @default.
- W1633606757 hasConcept C43617362 @default.
- W1633606757 hasConcept C46141821 @default.
- W1633606757 hasConcept C49040817 @default.
- W1633606757 hasConcept C520434653 @default.
- W1633606757 hasConcept C57863236 @default.
- W1633606757 hasConcept C62520636 @default.
- W1633606757 hasConcept C82706917 @default.
- W1633606757 hasConcept C85080765 @default.
- W1633606757 hasConceptScore W1633606757C110738630 @default.
- W1633606757 hasConceptScore W1633606757C113196181 @default.
- W1633606757 hasConceptScore W1633606757C120665830 @default.
- W1633606757 hasConceptScore W1633606757C121332964 @default.
- W1633606757 hasConceptScore W1633606757C138230450 @default.
- W1633606757 hasConceptScore W1633606757C171250308 @default.
- W1633606757 hasConceptScore W1633606757C175361016 @default.
- W1633606757 hasConceptScore W1633606757C185592680 @default.
- W1633606757 hasConceptScore W1633606757C187961010 @default.
- W1633606757 hasConceptScore W1633606757C19067145 @default.
- W1633606757 hasConceptScore W1633606757C192562407 @default.
- W1633606757 hasConceptScore W1633606757C194760766 @default.
- W1633606757 hasConceptScore W1633606757C2778871202 @default.
- W1633606757 hasConceptScore W1633606757C2779227376 @default.
- W1633606757 hasConceptScore W1633606757C2780064504 @default.
- W1633606757 hasConceptScore W1633606757C3792809 @default.
- W1633606757 hasConceptScore W1633606757C43617362 @default.
- W1633606757 hasConceptScore W1633606757C46141821 @default.
- W1633606757 hasConceptScore W1633606757C49040817 @default.
- W1633606757 hasConceptScore W1633606757C520434653 @default.
- W1633606757 hasConceptScore W1633606757C57863236 @default.
- W1633606757 hasConceptScore W1633606757C62520636 @default.
- W1633606757 hasConceptScore W1633606757C82706917 @default.
- W1633606757 hasConceptScore W1633606757C85080765 @default.
- W1633606757 hasLocation W16336067571 @default.
- W1633606757 hasOpenAccess W1633606757 @default.
- W1633606757 hasPrimaryLocation W16336067571 @default.
- W1633606757 hasRelatedWork W1966426973 @default.
- W1633606757 hasRelatedWork W1976131769 @default.
- W1633606757 hasRelatedWork W1978600859 @default.
- W1633606757 hasRelatedWork W1981822694 @default.
- W1633606757 hasRelatedWork W1993631606 @default.
- W1633606757 hasRelatedWork W1997273743 @default.
- W1633606757 hasRelatedWork W2015233777 @default.
- W1633606757 hasRelatedWork W2022579846 @default.
- W1633606757 hasRelatedWork W2064394489 @default.
- W1633606757 hasRelatedWork W2066637099 @default.
- W1633606757 hasRelatedWork W2069409537 @default.
- W1633606757 hasRelatedWork W2070214115 @default.
- W1633606757 hasRelatedWork W2071717143 @default.
- W1633606757 hasRelatedWork W2071816070 @default.
- W1633606757 hasRelatedWork W2079753527 @default.
- W1633606757 hasRelatedWork W2091872881 @default.
- W1633606757 hasRelatedWork W2119906651 @default.
- W1633606757 hasRelatedWork W2125190467 @default.
- W1633606757 hasRelatedWork W270037077 @default.
- W1633606757 hasRelatedWork W2180507153 @default.
- W1633606757 isParatext "false" @default.
- W1633606757 isRetracted "false" @default.
- W1633606757 magId "1633606757" @default.
- W1633606757 workType "article" @default.