Matches in SemOpenAlex for { <https://semopenalex.org/work/W1634541090> ?p ?o ?g. }
- W1634541090 endingPage "2002" @default.
- W1634541090 startingPage "1996" @default.
- W1634541090 abstract "Thin films of nonstoichiometric titanium dioxide (TiO2) and zirconium oxide (ZrO2) chemically stabilized by incorporating stoichiometric oxides of Al2O3 and SiO2, respectively, were fabricated by rf magnetron sputtering. These films deposited from ceramic targets of TiO2, TiO2–10 vol %Al2O3, ZrO2, and ZrO2–10 vol %SiO2 were designated as TiO2, TiO2–10Al2O3, ZrO2, and ZrO2–10SiO2. The dielectric and electrical properties of as-deposited and annealed TiO2 and ZrO2 films varied with the processing conditions. The addition of Al2O3 to TiO2 and SiO2 to ZrO2 films had not only reduced the dielectric loss tangent (tan δ) and increased resistivity, but also retained the competitive dielectric constant (k). The dielectric properties of the TiO2–10Al2O3 and ZrO2–10SiO2 films became stable under different deposition temperatures and annealing temperatures. The TiO2–10Al2O3 films with k=62, tan δ=0.012, resistivity of 2.5×108 Ω cm, and breakdown field of 2.2 MV/cm were obtained. ZrO2–10SiO2 films with good k values of 20–25 and low tan δ values of 0.011–0.014 can be obtained under rf power of 150 W, while k=14.5–16.4 and tan δ=0.012–0.019 under 100 W can be obtained. The advantage of adding the stoichiometric oxides of Al2O3 and SiO2 is the reduction of oxygen vacancies through the strong affinity of Al3+ and Si4+ to capture more oxygen for nonstoichiometric oxides of TiO2 and ZrO2." @default.
- W1634541090 created "2016-06-24" @default.
- W1634541090 creator A5060669094 @default.
- W1634541090 creator A5062837130 @default.
- W1634541090 creator A5080645474 @default.
- W1634541090 date "2003-10-24" @default.
- W1634541090 modified "2023-10-18" @default.
- W1634541090 title "Characterization of nonstoichiometric TiO2 and ZrO2 thin films stabilized by Al2O3 and SiO2 additions" @default.
- W1634541090 cites W1494800870 @default.
- W1634541090 cites W154577535 @default.
- W1634541090 cites W1546009536 @default.
- W1634541090 cites W1969975323 @default.
- W1634541090 cites W1971867210 @default.
- W1634541090 cites W1984892689 @default.
- W1634541090 cites W1991965248 @default.
- W1634541090 cites W2019592005 @default.
- W1634541090 cites W2026668005 @default.
- W1634541090 cites W2028992594 @default.
- W1634541090 cites W2029534622 @default.
- W1634541090 cites W2039273414 @default.
- W1634541090 cites W2053322905 @default.
- W1634541090 cites W2055646341 @default.
- W1634541090 cites W2057050065 @default.
- W1634541090 cites W2065201747 @default.
- W1634541090 cites W2067844473 @default.
- W1634541090 cites W2076313449 @default.
- W1634541090 cites W2076953148 @default.
- W1634541090 cites W2079719052 @default.
- W1634541090 cites W2170398891 @default.
- W1634541090 doi "https://doi.org/10.1116/1.1622675" @default.
- W1634541090 hasPublicationYear "2003" @default.
- W1634541090 type Work @default.
- W1634541090 sameAs 1634541090 @default.
- W1634541090 citedByCount "10" @default.
- W1634541090 countsByYear W16345410902014 @default.
- W1634541090 countsByYear W16345410902020 @default.
- W1634541090 crossrefType "journal-article" @default.
- W1634541090 hasAuthorship W1634541090A5060669094 @default.
- W1634541090 hasAuthorship W1634541090A5062837130 @default.
- W1634541090 hasAuthorship W1634541090A5080645474 @default.
- W1634541090 hasConcept C113196181 @default.
- W1634541090 hasConcept C119599485 @default.
- W1634541090 hasConcept C123408415 @default.
- W1634541090 hasConcept C127413603 @default.
- W1634541090 hasConcept C133386390 @default.
- W1634541090 hasConcept C134132462 @default.
- W1634541090 hasConcept C144082473 @default.
- W1634541090 hasConcept C147789679 @default.
- W1634541090 hasConcept C171250308 @default.
- W1634541090 hasConcept C178790620 @default.
- W1634541090 hasConcept C185592680 @default.
- W1634541090 hasConcept C19067145 @default.
- W1634541090 hasConcept C191897082 @default.
- W1634541090 hasConcept C192562407 @default.
- W1634541090 hasConcept C199289684 @default.
- W1634541090 hasConcept C22423302 @default.
- W1634541090 hasConcept C2777855556 @default.
- W1634541090 hasConcept C43617362 @default.
- W1634541090 hasConcept C49040817 @default.
- W1634541090 hasConcept C506065880 @default.
- W1634541090 hasConcept C540031477 @default.
- W1634541090 hasConcept C61427134 @default.
- W1634541090 hasConcept C69990965 @default.
- W1634541090 hasConcept C91066073 @default.
- W1634541090 hasConcept C97274863 @default.
- W1634541090 hasConceptScore W1634541090C113196181 @default.
- W1634541090 hasConceptScore W1634541090C119599485 @default.
- W1634541090 hasConceptScore W1634541090C123408415 @default.
- W1634541090 hasConceptScore W1634541090C127413603 @default.
- W1634541090 hasConceptScore W1634541090C133386390 @default.
- W1634541090 hasConceptScore W1634541090C134132462 @default.
- W1634541090 hasConceptScore W1634541090C144082473 @default.
- W1634541090 hasConceptScore W1634541090C147789679 @default.
- W1634541090 hasConceptScore W1634541090C171250308 @default.
- W1634541090 hasConceptScore W1634541090C178790620 @default.
- W1634541090 hasConceptScore W1634541090C185592680 @default.
- W1634541090 hasConceptScore W1634541090C19067145 @default.
- W1634541090 hasConceptScore W1634541090C191897082 @default.
- W1634541090 hasConceptScore W1634541090C192562407 @default.
- W1634541090 hasConceptScore W1634541090C199289684 @default.
- W1634541090 hasConceptScore W1634541090C22423302 @default.
- W1634541090 hasConceptScore W1634541090C2777855556 @default.
- W1634541090 hasConceptScore W1634541090C43617362 @default.
- W1634541090 hasConceptScore W1634541090C49040817 @default.
- W1634541090 hasConceptScore W1634541090C506065880 @default.
- W1634541090 hasConceptScore W1634541090C540031477 @default.
- W1634541090 hasConceptScore W1634541090C61427134 @default.
- W1634541090 hasConceptScore W1634541090C69990965 @default.
- W1634541090 hasConceptScore W1634541090C91066073 @default.
- W1634541090 hasConceptScore W1634541090C97274863 @default.
- W1634541090 hasIssue "6" @default.
- W1634541090 hasLocation W16345410901 @default.
- W1634541090 hasOpenAccess W1634541090 @default.
- W1634541090 hasPrimaryLocation W16345410901 @default.
- W1634541090 hasRelatedWork W1984816731 @default.
- W1634541090 hasRelatedWork W1987320405 @default.
- W1634541090 hasRelatedWork W1988779981 @default.
- W1634541090 hasRelatedWork W2011649877 @default.