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- W1634853733 abstract "The boron cathodic arc ion source has been developed with a view to several applications, particularly the problem of shallow junction doping in semiconductors. Research has included not only development and operation of the boron cathode, but other cathode materials as well. Applications have included a large deposition directed toward development of a neutron detector and another deposition for an orthopedic coating, as well as the shallow ion implantation function. Operational experience is described and information pertinent to commercial operation, extracted from these experiments, is presented." @default.
- W1634853733 created "2016-06-24" @default.
- W1634853733 creator A5002432241 @default.
- W1634853733 creator A5022424402 @default.
- W1634853733 creator A5028711446 @default.
- W1634853733 creator A5050355604 @default.
- W1634853733 creator A5071659431 @default.
- W1634853733 date "2008-01-01" @default.
- W1634853733 modified "2023-09-27" @default.
- W1634853733 title "Operation and Applications of the Boron Cathodic Arc Ion Source" @default.
- W1634853733 doi "https://doi.org/10.1063/1.3033664" @default.
- W1634853733 hasPublicationYear "2008" @default.
- W1634853733 type Work @default.
- W1634853733 sameAs 1634853733 @default.
- W1634853733 citedByCount "7" @default.
- W1634853733 countsByYear W16348537332018 @default.
- W1634853733 countsByYear W16348537332019 @default.
- W1634853733 countsByYear W16348537332020 @default.
- W1634853733 countsByYear W16348537332021 @default.
- W1634853733 countsByYear W16348537332022 @default.
- W1634853733 crossrefType "proceedings-article" @default.
- W1634853733 hasAuthorship W1634853733A5002432241 @default.
- W1634853733 hasAuthorship W1634853733A5022424402 @default.
- W1634853733 hasAuthorship W1634853733A5028711446 @default.
- W1634853733 hasAuthorship W1634853733A5050355604 @default.
- W1634853733 hasAuthorship W1634853733A5071659431 @default.
- W1634853733 hasConcept C114375839 @default.
- W1634853733 hasConcept C116915560 @default.
- W1634853733 hasConcept C119599485 @default.
- W1634853733 hasConcept C121332964 @default.
- W1634853733 hasConcept C127313418 @default.
- W1634853733 hasConcept C127413603 @default.
- W1634853733 hasConcept C145148216 @default.
- W1634853733 hasConcept C147789679 @default.
- W1634853733 hasConcept C151730666 @default.
- W1634853733 hasConcept C171250308 @default.
- W1634853733 hasConcept C17525397 @default.
- W1634853733 hasConcept C178790620 @default.
- W1634853733 hasConcept C185544564 @default.
- W1634853733 hasConcept C185592680 @default.
- W1634853733 hasConcept C192562407 @default.
- W1634853733 hasConcept C205871581 @default.
- W1634853733 hasConcept C2781448156 @default.
- W1634853733 hasConcept C2816523 @default.
- W1634853733 hasConcept C41823505 @default.
- W1634853733 hasConcept C49040817 @default.
- W1634853733 hasConcept C49110097 @default.
- W1634853733 hasConcept C501308230 @default.
- W1634853733 hasConcept C57863236 @default.
- W1634853733 hasConcept C64297162 @default.
- W1634853733 hasConcept C67009288 @default.
- W1634853733 hasConcept C78519656 @default.
- W1634853733 hasConcept C83415579 @default.
- W1634853733 hasConcept C89395315 @default.
- W1634853733 hasConceptScore W1634853733C114375839 @default.
- W1634853733 hasConceptScore W1634853733C116915560 @default.
- W1634853733 hasConceptScore W1634853733C119599485 @default.
- W1634853733 hasConceptScore W1634853733C121332964 @default.
- W1634853733 hasConceptScore W1634853733C127313418 @default.
- W1634853733 hasConceptScore W1634853733C127413603 @default.
- W1634853733 hasConceptScore W1634853733C145148216 @default.
- W1634853733 hasConceptScore W1634853733C147789679 @default.
- W1634853733 hasConceptScore W1634853733C151730666 @default.
- W1634853733 hasConceptScore W1634853733C171250308 @default.
- W1634853733 hasConceptScore W1634853733C17525397 @default.
- W1634853733 hasConceptScore W1634853733C178790620 @default.
- W1634853733 hasConceptScore W1634853733C185544564 @default.
- W1634853733 hasConceptScore W1634853733C185592680 @default.
- W1634853733 hasConceptScore W1634853733C192562407 @default.
- W1634853733 hasConceptScore W1634853733C205871581 @default.
- W1634853733 hasConceptScore W1634853733C2781448156 @default.
- W1634853733 hasConceptScore W1634853733C2816523 @default.
- W1634853733 hasConceptScore W1634853733C41823505 @default.
- W1634853733 hasConceptScore W1634853733C49040817 @default.
- W1634853733 hasConceptScore W1634853733C49110097 @default.
- W1634853733 hasConceptScore W1634853733C501308230 @default.
- W1634853733 hasConceptScore W1634853733C57863236 @default.
- W1634853733 hasConceptScore W1634853733C64297162 @default.
- W1634853733 hasConceptScore W1634853733C67009288 @default.
- W1634853733 hasConceptScore W1634853733C78519656 @default.
- W1634853733 hasConceptScore W1634853733C83415579 @default.
- W1634853733 hasConceptScore W1634853733C89395315 @default.
- W1634853733 hasLocation W16348537331 @default.
- W1634853733 hasOpenAccess W1634853733 @default.
- W1634853733 hasPrimaryLocation W16348537331 @default.
- W1634853733 hasRelatedWork W114353974 @default.
- W1634853733 hasRelatedWork W2022819224 @default.
- W1634853733 hasRelatedWork W2042700473 @default.
- W1634853733 hasRelatedWork W2045599995 @default.
- W1634853733 hasRelatedWork W2120552090 @default.
- W1634853733 hasRelatedWork W2139124909 @default.
- W1634853733 hasRelatedWork W2168844626 @default.
- W1634853733 hasRelatedWork W2314932944 @default.
- W1634853733 hasRelatedWork W2988513829 @default.
- W1634853733 hasRelatedWork W4380203706 @default.
- W1634853733 isParatext "false" @default.
- W1634853733 isRetracted "false" @default.
- W1634853733 magId "1634853733" @default.
- W1634853733 workType "article" @default.