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- W1635210737 abstract "Variable angle spectroscopic ellipsometry (VASE) has been applied to cubic SiC. This technique gives absolute values of the refractive index (n) and the extinction coefficient (k) of a substrate and/or a thin film of an unknown material. The samples were grown by chemical vapor deposition (CVD) on p-type silicon. The substrate was aligned either on the (001.) axis or 1° off (001). Several growth temperatures and growth durations were used. The samples were divided into two groups: (a) thick films, of order 10 μm, grown near optimal conditions of temperature, flow and gas ratios; (b) thin films, of order 100A, grown at various temperatures." @default.
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- W1635210737 date "1989-01-01" @default.
- W1635210737 modified "2023-09-27" @default.
- W1635210737 title "Ellipsometric Study of Cubic SiC" @default.
- W1635210737 doi "https://doi.org/10.1007/978-3-642-75048-9_24" @default.
- W1635210737 hasPublicationYear "1989" @default.
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