Matches in SemOpenAlex for { <https://semopenalex.org/work/W1636281465> ?p ?o ?g. }
Showing items 1 to 90 of
90
with 100 items per page.
- W1636281465 abstract "A short overview will be given concerning recent advances in micromachining technology, including surface and bulk silicon micromachining, galvano deposition and bonding techniques. Following this short overview, a number of examples dealing with the design, fabrication and application of microsystems will be presented. In particular the following microsystems will be discussed in detail: (1) miniaturized chemical analysis systems; (2) micro instrumentation for space research; (3) miniaturized fluid handling systems; (4) scanning probe systems; (5) electrostatic and ultrasonic millimotors; (6) micro opto-mechanical systems." @default.
- W1636281465 created "2016-06-24" @default.
- W1636281465 creator A5002122862 @default.
- W1636281465 date "2002-11-19" @default.
- W1636281465 modified "2023-09-28" @default.
- W1636281465 title "Current applications of silicon based microsystems" @default.
- W1636281465 cites W1603476610 @default.
- W1636281465 cites W1930606732 @default.
- W1636281465 cites W1979783781 @default.
- W1636281465 cites W1991670985 @default.
- W1636281465 cites W1992502210 @default.
- W1636281465 cites W2003690666 @default.
- W1636281465 cites W2018571673 @default.
- W1636281465 cites W2040569498 @default.
- W1636281465 cites W2049099260 @default.
- W1636281465 cites W2101158002 @default.
- W1636281465 cites W2113552656 @default.
- W1636281465 cites W2137178805 @default.
- W1636281465 cites W2169838980 @default.
- W1636281465 cites W2171224332 @default.
- W1636281465 cites W2532022498 @default.
- W1636281465 cites W832923644 @default.
- W1636281465 cites W2108542605 @default.
- W1636281465 doi "https://doi.org/10.1109/mhs.1995.494210" @default.
- W1636281465 hasPublicationYear "2002" @default.
- W1636281465 type Work @default.
- W1636281465 sameAs 1636281465 @default.
- W1636281465 citedByCount "1" @default.
- W1636281465 countsByYear W16362814652022 @default.
- W1636281465 crossrefType "proceedings-article" @default.
- W1636281465 hasAuthorship W1636281465A5002122862 @default.
- W1636281465 hasConcept C111919701 @default.
- W1636281465 hasConcept C118530786 @default.
- W1636281465 hasConcept C127413603 @default.
- W1636281465 hasConcept C136525101 @default.
- W1636281465 hasConcept C142724271 @default.
- W1636281465 hasConcept C145667562 @default.
- W1636281465 hasConcept C151054161 @default.
- W1636281465 hasConcept C171250308 @default.
- W1636281465 hasConcept C192562407 @default.
- W1636281465 hasConcept C201995342 @default.
- W1636281465 hasConcept C204787440 @default.
- W1636281465 hasConcept C41008148 @default.
- W1636281465 hasConcept C41075158 @default.
- W1636281465 hasConcept C49040817 @default.
- W1636281465 hasConcept C544956773 @default.
- W1636281465 hasConcept C71924100 @default.
- W1636281465 hasConceptScore W1636281465C111919701 @default.
- W1636281465 hasConceptScore W1636281465C118530786 @default.
- W1636281465 hasConceptScore W1636281465C127413603 @default.
- W1636281465 hasConceptScore W1636281465C136525101 @default.
- W1636281465 hasConceptScore W1636281465C142724271 @default.
- W1636281465 hasConceptScore W1636281465C145667562 @default.
- W1636281465 hasConceptScore W1636281465C151054161 @default.
- W1636281465 hasConceptScore W1636281465C171250308 @default.
- W1636281465 hasConceptScore W1636281465C192562407 @default.
- W1636281465 hasConceptScore W1636281465C201995342 @default.
- W1636281465 hasConceptScore W1636281465C204787440 @default.
- W1636281465 hasConceptScore W1636281465C41008148 @default.
- W1636281465 hasConceptScore W1636281465C41075158 @default.
- W1636281465 hasConceptScore W1636281465C49040817 @default.
- W1636281465 hasConceptScore W1636281465C544956773 @default.
- W1636281465 hasConceptScore W1636281465C71924100 @default.
- W1636281465 hasLocation W16362814651 @default.
- W1636281465 hasOpenAccess W1636281465 @default.
- W1636281465 hasPrimaryLocation W16362814651 @default.
- W1636281465 hasRelatedWork W107137090 @default.
- W1636281465 hasRelatedWork W1551267100 @default.
- W1636281465 hasRelatedWork W1954043900 @default.
- W1636281465 hasRelatedWork W1969122164 @default.
- W1636281465 hasRelatedWork W2028768478 @default.
- W1636281465 hasRelatedWork W2044305683 @default.
- W1636281465 hasRelatedWork W2052177197 @default.
- W1636281465 hasRelatedWork W2088357735 @default.
- W1636281465 hasRelatedWork W2089580594 @default.
- W1636281465 hasRelatedWork W2107742247 @default.
- W1636281465 hasRelatedWork W2138782985 @default.
- W1636281465 hasRelatedWork W234153364 @default.
- W1636281465 hasRelatedWork W2377325896 @default.
- W1636281465 hasRelatedWork W2547781058 @default.
- W1636281465 hasRelatedWork W2588316698 @default.
- W1636281465 hasRelatedWork W2785574836 @default.
- W1636281465 hasRelatedWork W3184420626 @default.
- W1636281465 hasRelatedWork W6382885 @default.
- W1636281465 hasRelatedWork W837223080 @default.
- W1636281465 hasRelatedWork W2184753726 @default.
- W1636281465 isParatext "false" @default.
- W1636281465 isRetracted "false" @default.
- W1636281465 magId "1636281465" @default.
- W1636281465 workType "article" @default.