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- W1636735891 abstract "Epitaxial aluminum nitride films on 6H-SiC (0001) were fabricated using reactive RF magnetron sputtering and post-deposition rapid thermal annealing. The electrical properties of AIN films depending on film thickness and measurement temperature have been observed. Full width at half maximum of AIN (0002) was <TEX>$0.1204^{circ}$</TEX> (about 430 arcsec) X-ray rocking curve results. The equivalent oxide thickness (EOT) of AIN film was estimated as about 10 nm and the leakage current density was within the order of <TEX>$10^{-8} 4/cm^2$</TEX>. The dielectric constant of AIN film estimated from the accumulation region of C-V curve measured at <TEX>$300^{circ}C$</TEX> was 8.3. The dynamic dielectric constant was obtained as 5.1 from J vs. 1/T plots at the temperature ranging from R.T. to <TEX>$300^{circ}C$</TEX> From above, estimation temperature dependance of the electrical properties of Al/AIN/SiC MIS devices was affirmed and useful data compilation for the reliabilities of SiC MIS is expected." @default.
- W1636735891 created "2016-06-24" @default.
- W1636735891 date "2006-01-01" @default.
- W1636735891 modified "2023-09-26" @default.
- W1636735891 title "Temperature Dependence on Electrical Characterization of Epitaxially Grown AIN film on 6H-SiC Structures" @default.
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- W1636735891 doi "https://doi.org/10.4313/jkem.2006.19.1.018" @default.
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