Matches in SemOpenAlex for { <https://semopenalex.org/work/W1637656892> ?p ?o ?g. }
Showing items 1 to 90 of
90
with 100 items per page.
- W1637656892 endingPage "142904" @default.
- W1637656892 startingPage "142904" @default.
- W1637656892 abstract "We report the structural and longitudinal piezoelectric responses (d33) of epitaxial Pb(Zr0.52Ti0.48)O3 (PZT) films on (001) SrTiO3 and Si substrates in the thickness range of 40nm–4μm. With increasing film thickness the tetragonality of PZT was reduced. The increase in d33 value with increasing film thicknesses was attributed to the reduction of substrate constraints and softening of PZT due to reduced tetragonality. The d33 values of PZT films on Si substrates (∼330pm∕V) are higher than those on SrTiO3 substrates (∼200pm∕V). The epitaxial PZT films on silicon will lead to the fabrication of high performance piezoelectric microelectromechanical devices." @default.
- W1637656892 created "2016-06-24" @default.
- W1637656892 creator A5014493844 @default.
- W1637656892 creator A5014904924 @default.
- W1637656892 creator A5061141003 @default.
- W1637656892 creator A5066368974 @default.
- W1637656892 creator A5068131212 @default.
- W1637656892 creator A5071389289 @default.
- W1637656892 creator A5089053427 @default.
- W1637656892 date "2006-04-03" @default.
- W1637656892 modified "2023-10-03" @default.
- W1637656892 title "Thickness dependence of structural and piezoelectric properties of epitaxial Pb(Zr0.52Ti0.48)O3 films on Si and SrTiO3 substrates" @default.
- W1637656892 cites W1504573265 @default.
- W1637656892 cites W1625782620 @default.
- W1637656892 cites W1978852737 @default.
- W1637656892 cites W1987226307 @default.
- W1637656892 cites W1994777382 @default.
- W1637656892 cites W2021144932 @default.
- W1637656892 cites W2044984584 @default.
- W1637656892 cites W2046584105 @default.
- W1637656892 cites W2054445416 @default.
- W1637656892 cites W2070926906 @default.
- W1637656892 cites W2074895580 @default.
- W1637656892 cites W2077208271 @default.
- W1637656892 cites W2120828770 @default.
- W1637656892 cites W2139497148 @default.
- W1637656892 doi "https://doi.org/10.1063/1.2185614" @default.
- W1637656892 hasPublicationYear "2006" @default.
- W1637656892 type Work @default.
- W1637656892 sameAs 1637656892 @default.
- W1637656892 citedByCount "117" @default.
- W1637656892 countsByYear W16376568922012 @default.
- W1637656892 countsByYear W16376568922013 @default.
- W1637656892 countsByYear W16376568922014 @default.
- W1637656892 countsByYear W16376568922015 @default.
- W1637656892 countsByYear W16376568922016 @default.
- W1637656892 countsByYear W16376568922017 @default.
- W1637656892 countsByYear W16376568922018 @default.
- W1637656892 countsByYear W16376568922019 @default.
- W1637656892 countsByYear W16376568922020 @default.
- W1637656892 countsByYear W16376568922021 @default.
- W1637656892 countsByYear W16376568922022 @default.
- W1637656892 countsByYear W16376568922023 @default.
- W1637656892 crossrefType "journal-article" @default.
- W1637656892 hasAuthorship W1637656892A5014493844 @default.
- W1637656892 hasAuthorship W1637656892A5014904924 @default.
- W1637656892 hasAuthorship W1637656892A5061141003 @default.
- W1637656892 hasAuthorship W1637656892A5066368974 @default.
- W1637656892 hasAuthorship W1637656892A5068131212 @default.
- W1637656892 hasAuthorship W1637656892A5071389289 @default.
- W1637656892 hasAuthorship W1637656892A5089053427 @default.
- W1637656892 hasBestOaLocation W16376568922 @default.
- W1637656892 hasConcept C100082104 @default.
- W1637656892 hasConcept C110738630 @default.
- W1637656892 hasConcept C121332964 @default.
- W1637656892 hasConcept C159985019 @default.
- W1637656892 hasConcept C192562407 @default.
- W1637656892 hasConcept C26873012 @default.
- W1637656892 hasConcept C2779227376 @default.
- W1637656892 hasConcept C49040817 @default.
- W1637656892 hasConceptScore W1637656892C100082104 @default.
- W1637656892 hasConceptScore W1637656892C110738630 @default.
- W1637656892 hasConceptScore W1637656892C121332964 @default.
- W1637656892 hasConceptScore W1637656892C159985019 @default.
- W1637656892 hasConceptScore W1637656892C192562407 @default.
- W1637656892 hasConceptScore W1637656892C26873012 @default.
- W1637656892 hasConceptScore W1637656892C2779227376 @default.
- W1637656892 hasConceptScore W1637656892C49040817 @default.
- W1637656892 hasIssue "14" @default.
- W1637656892 hasLocation W16376568921 @default.
- W1637656892 hasLocation W16376568922 @default.
- W1637656892 hasOpenAccess W1637656892 @default.
- W1637656892 hasPrimaryLocation W16376568921 @default.
- W1637656892 hasRelatedWork W1990086497 @default.
- W1637656892 hasRelatedWork W2016211791 @default.
- W1637656892 hasRelatedWork W2028132284 @default.
- W1637656892 hasRelatedWork W2061717923 @default.
- W1637656892 hasRelatedWork W2159445002 @default.
- W1637656892 hasRelatedWork W2359476263 @default.
- W1637656892 hasRelatedWork W2374308001 @default.
- W1637656892 hasRelatedWork W2379633532 @default.
- W1637656892 hasRelatedWork W3092191280 @default.
- W1637656892 hasRelatedWork W4292225569 @default.
- W1637656892 hasVolume "88" @default.
- W1637656892 isParatext "false" @default.
- W1637656892 isRetracted "false" @default.
- W1637656892 magId "1637656892" @default.
- W1637656892 workType "article" @default.