Matches in SemOpenAlex for { <https://semopenalex.org/work/W1638592012> ?p ?o ?g. }
Showing items 1 to 98 of
98
with 100 items per page.
- W1638592012 abstract "The authors report on the growth and characterization of CeO2 epitaxial films doped with 18at.% HfO2 (HDC) as gate dielectrics for Si technology prepared by ultrahigh vacuum pulsed laser deposition. In situ reflection high-energy electron diffraction and cross-sectional high-resolution transmission electron microscopy reveal the formation of an epitaxial HDC/Si structure with (111)HDC‖(001)Si and [110]HDC‖[110]Si orientation relationship. C-V and I-V measurements indicate a dielectric constant κ∼19.5 for HDC film and the leakage current density at 1V gate bias is about four orders of magnitude lower than that of the CeO2 in both 25nm thickness." @default.
- W1638592012 created "2016-06-24" @default.
- W1638592012 creator A5011723035 @default.
- W1638592012 creator A5030120711 @default.
- W1638592012 creator A5041925148 @default.
- W1638592012 creator A5059583846 @default.
- W1638592012 creator A5087623395 @default.
- W1638592012 date "2008-01-07" @default.
- W1638592012 modified "2023-09-27" @default.
- W1638592012 title "Epitaxial growth of HfO[sub 2] doped CeO[sub 2] thin films on Si(001) substrates for high-κ application" @default.
- W1638592012 cites W1525247245 @default.
- W1638592012 cites W1557570792 @default.
- W1638592012 cites W1635715987 @default.
- W1638592012 cites W1990378031 @default.
- W1638592012 cites W1997868664 @default.
- W1638592012 cites W2003645630 @default.
- W1638592012 cites W2014498305 @default.
- W1638592012 cites W2031649662 @default.
- W1638592012 cites W2039191639 @default.
- W1638592012 cites W2042052988 @default.
- W1638592012 cites W2065412606 @default.
- W1638592012 cites W2072819577 @default.
- W1638592012 cites W2078414332 @default.
- W1638592012 cites W2093417831 @default.
- W1638592012 cites W2101781928 @default.
- W1638592012 cites W2108105063 @default.
- W1638592012 doi "https://doi.org/10.1063/1.2829792" @default.
- W1638592012 hasPublicationYear "2008" @default.
- W1638592012 type Work @default.
- W1638592012 sameAs 1638592012 @default.
- W1638592012 citedByCount "9" @default.
- W1638592012 countsByYear W16385920122012 @default.
- W1638592012 countsByYear W16385920122013 @default.
- W1638592012 countsByYear W16385920122016 @default.
- W1638592012 countsByYear W16385920122021 @default.
- W1638592012 crossrefType "journal-article" @default.
- W1638592012 hasAuthorship W1638592012A5011723035 @default.
- W1638592012 hasAuthorship W1638592012A5030120711 @default.
- W1638592012 hasAuthorship W1638592012A5041925148 @default.
- W1638592012 hasAuthorship W1638592012A5059583846 @default.
- W1638592012 hasAuthorship W1638592012A5087623395 @default.
- W1638592012 hasConcept C110738630 @default.
- W1638592012 hasConcept C113196181 @default.
- W1638592012 hasConcept C120665830 @default.
- W1638592012 hasConcept C121332964 @default.
- W1638592012 hasConcept C133386390 @default.
- W1638592012 hasConcept C146088050 @default.
- W1638592012 hasConcept C161368742 @default.
- W1638592012 hasConcept C171250308 @default.
- W1638592012 hasConcept C185592680 @default.
- W1638592012 hasConcept C19067145 @default.
- W1638592012 hasConcept C192562407 @default.
- W1638592012 hasConcept C207114421 @default.
- W1638592012 hasConcept C2779227376 @default.
- W1638592012 hasConcept C37982897 @default.
- W1638592012 hasConcept C43617362 @default.
- W1638592012 hasConcept C49040817 @default.
- W1638592012 hasConcept C544956773 @default.
- W1638592012 hasConcept C57863236 @default.
- W1638592012 hasConcept C77557913 @default.
- W1638592012 hasConceptScore W1638592012C110738630 @default.
- W1638592012 hasConceptScore W1638592012C113196181 @default.
- W1638592012 hasConceptScore W1638592012C120665830 @default.
- W1638592012 hasConceptScore W1638592012C121332964 @default.
- W1638592012 hasConceptScore W1638592012C133386390 @default.
- W1638592012 hasConceptScore W1638592012C146088050 @default.
- W1638592012 hasConceptScore W1638592012C161368742 @default.
- W1638592012 hasConceptScore W1638592012C171250308 @default.
- W1638592012 hasConceptScore W1638592012C185592680 @default.
- W1638592012 hasConceptScore W1638592012C19067145 @default.
- W1638592012 hasConceptScore W1638592012C192562407 @default.
- W1638592012 hasConceptScore W1638592012C207114421 @default.
- W1638592012 hasConceptScore W1638592012C2779227376 @default.
- W1638592012 hasConceptScore W1638592012C37982897 @default.
- W1638592012 hasConceptScore W1638592012C43617362 @default.
- W1638592012 hasConceptScore W1638592012C49040817 @default.
- W1638592012 hasConceptScore W1638592012C544956773 @default.
- W1638592012 hasConceptScore W1638592012C57863236 @default.
- W1638592012 hasConceptScore W1638592012C77557913 @default.
- W1638592012 hasIssue "1" @default.
- W1638592012 hasLocation W16385920121 @default.
- W1638592012 hasOpenAccess W1638592012 @default.
- W1638592012 hasPrimaryLocation W16385920121 @default.
- W1638592012 hasRelatedWork W129876672 @default.
- W1638592012 hasRelatedWork W1505291104 @default.
- W1638592012 hasRelatedWork W1629994647 @default.
- W1638592012 hasRelatedWork W1986197242 @default.
- W1638592012 hasRelatedWork W2024865455 @default.
- W1638592012 hasRelatedWork W2037132691 @default.
- W1638592012 hasRelatedWork W2059068205 @default.
- W1638592012 hasRelatedWork W2081079005 @default.
- W1638592012 hasRelatedWork W2084737276 @default.
- W1638592012 hasRelatedWork W2361676529 @default.
- W1638592012 hasVolume "92" @default.
- W1638592012 isParatext "false" @default.
- W1638592012 isRetracted "false" @default.
- W1638592012 magId "1638592012" @default.
- W1638592012 workType "article" @default.