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- W1639279920 abstract "It is only recently that the ITRS (International Technical Roadmap for Semiconductors) has identified functional diversification through heterogeneous integration as a key enabler of future industry growth. This paper describes a powerful temperature‐programmed gas‐sensing technique that has the potential to convert low‐cost, integrated, microhotplate‐based non‐selective, metal‐oxide gas sensors into stable, sensitive, and highly selective gas‐sensor systems. The paper also points out the importance of heterogeneous integration and temperature sensor stability to support this measurement technique." @default.
- W1639279920 created "2016-06-24" @default.
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- W1639279920 date "2009-01-01" @default.
- W1639279920 modified "2023-10-16" @default.
- W1639279920 title "Temperature-Programmed Gas-Sensing With Microhotplates: an Opportunity to Enhance Microelectronic Gas Sensor Metrology" @default.
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- W1639279920 doi "https://doi.org/10.1063/1.3251222" @default.
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