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- W1640678692 abstract "This paper deals with the fabrication of submicron niobium microbridges and submicron niobium tunnel junctions. Several techniques are described to fabricate niobium microbridges. The most important of them is a technique in which niobium is evaporated through a bakable submicorn mask. The technique to fabricate submicron tunnel junctions is basically a shadow evaporation technique. In contrast to earlier attempts it is a reproducible method suitable for large scale application." @default.
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- W1640678692 date "1978-01-01" @default.
- W1640678692 modified "2023-09-24" @default.
- W1640678692 title "Alternatives in fabricating submicron niobium Josephson junctions" @default.
- W1640678692 doi "https://doi.org/10.1063/1.31356" @default.
- W1640678692 hasPublicationYear "1978" @default.
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