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- W1640777652 abstract "Results on Plasma Immersion Ion Implantation (Pill) of nitrogen ions into a metal surface using microwave plasma source are described. Preliminary results in our benchtop PIII system with microwave source showed successful N/sup +/ implantation in an Al sample but indicated the necessity of better plasma optimization and confirmed a need for a high repetition rate, negative high voltage pulser which is presently under development." @default.
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- W1640777652 date "2002-12-24" @default.
- W1640777652 modified "2023-09-25" @default.
- W1640777652 title "Nitrogen plasma immersion ion implantation of metals with a 2.45 GHz microwave source" @default.
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- W1640777652 doi "https://doi.org/10.1109/deiv.1996.545434" @default.
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