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- W1642385550 abstract "In this work we report a detailed SIMS analysis of the diffusion of ion implanted B in SiO2. Using the joined half Gaussian approximation to the initial B profile the diffusion of B has been modeled for temperatures of 1050° to 1200°C. A fast diffusing tail has been observed for diffusion temperatures below 1050°C. A method is suggested to minimize this ‘‘tail’’ diffusions." @default.
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- W1642385550 date "1984-01-01" @default.
- W1642385550 modified "2023-09-24" @default.
- W1642385550 title "The diffusion of ion−implanted boron in silicon dioxide" @default.
- W1642385550 doi "https://doi.org/10.1063/1.34817" @default.
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