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- W1644265269 abstract "We have successfully demonstrated the feasibility of fabricating three-dimensional microstructures by using a combined silicon mold insert and micro hot embossing process (SMIHE). Anisotropic silicon wet etching process has been used to define microstructures on top of a four inch silicon wafer. The whole wafer is then used as the mold insert in a micro hot pressing machine to duplicate plastic microstructures repeatedly. Fine micro pyramid shape microstructures with base width of 30 /spl mu/m and height of about 21 /spl mu/m have been fabricated by this method as a demonstration. They have very smooth surfaces and may be suitable for optical applications. This new process shows promise for achieving high yield, reliable fine microstructures on plastic films." @default.
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- W1644265269 date "2002-12-24" @default.
- W1644265269 modified "2023-09-26" @default.
- W1644265269 title "Microfabrication using silicon mold inserts and hot embossing" @default.
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- W1644265269 doi "https://doi.org/10.1109/mhs.1996.563403" @default.
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