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- W1644701606 endingPage "1081" @default.
- W1644701606 startingPage "1079" @default.
- W1644701606 abstract "We present a wafer-level vacuum-encapsulated silicon resonator fabricated in MEMS Integrated Design for Inertial Sensors, a commercial pure-play MEMS process, recently introduced by Teledyne DALSA Semiconductor Inc. Our prototype Lamé mode encapsulated in an ultra-clean 10-mtorr vacuum cavity, achieved a quality factor of 3.24 million at a resonance frequency of 6.89 MHz, resulting in the highest recorded f-Q product of 2.23 × 10 <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>13</sup> Hz for wafer-level vacuum-encapsulated silicon resonators fabricated in a commercial MEMS process." @default.
- W1644701606 created "2016-06-24" @default.
- W1644701606 creator A5015128341 @default.
- W1644701606 creator A5059734749 @default.
- W1644701606 date "2015-10-01" @default.
- W1644701606 modified "2023-09-28" @default.
- W1644701606 title "Wafer-Level Vacuum-Encapsulated Lamé Mode Resonator With f-Q Product of $2.23 times 10^{13}$ Hz" @default.
- W1644701606 cites W1965634225 @default.
- W1644701606 cites W1986982460 @default.
- W1644701606 cites W2018806435 @default.
- W1644701606 cites W2105093937 @default.
- W1644701606 cites W2112253879 @default.
- W1644701606 cites W2117915185 @default.
- W1644701606 cites W2123499220 @default.
- W1644701606 cites W2123891030 @default.
- W1644701606 cites W2130795074 @default.
- W1644701606 cites W2157205162 @default.
- W1644701606 doi "https://doi.org/10.1109/led.2015.2464713" @default.
- W1644701606 hasPublicationYear "2015" @default.
- W1644701606 type Work @default.
- W1644701606 sameAs 1644701606 @default.
- W1644701606 citedByCount "24" @default.
- W1644701606 countsByYear W16447016062016 @default.
- W1644701606 countsByYear W16447016062017 @default.
- W1644701606 countsByYear W16447016062018 @default.
- W1644701606 countsByYear W16447016062019 @default.
- W1644701606 countsByYear W16447016062020 @default.
- W1644701606 countsByYear W16447016062021 @default.
- W1644701606 countsByYear W16447016062022 @default.
- W1644701606 countsByYear W16447016062023 @default.
- W1644701606 crossrefType "journal-article" @default.
- W1644701606 hasAuthorship W1644701606A5015128341 @default.
- W1644701606 hasAuthorship W1644701606A5059734749 @default.
- W1644701606 hasConcept C119599485 @default.
- W1644701606 hasConcept C127413603 @default.
- W1644701606 hasConcept C160671074 @default.
- W1644701606 hasConcept C187725362 @default.
- W1644701606 hasConcept C192562407 @default.
- W1644701606 hasConcept C37977207 @default.
- W1644701606 hasConcept C49040817 @default.
- W1644701606 hasConcept C544956773 @default.
- W1644701606 hasConcept C97126364 @default.
- W1644701606 hasConceptScore W1644701606C119599485 @default.
- W1644701606 hasConceptScore W1644701606C127413603 @default.
- W1644701606 hasConceptScore W1644701606C160671074 @default.
- W1644701606 hasConceptScore W1644701606C187725362 @default.
- W1644701606 hasConceptScore W1644701606C192562407 @default.
- W1644701606 hasConceptScore W1644701606C37977207 @default.
- W1644701606 hasConceptScore W1644701606C49040817 @default.
- W1644701606 hasConceptScore W1644701606C544956773 @default.
- W1644701606 hasConceptScore W1644701606C97126364 @default.
- W1644701606 hasFunder F4320334593 @default.
- W1644701606 hasIssue "10" @default.
- W1644701606 hasLocation W16447016061 @default.
- W1644701606 hasOpenAccess W1644701606 @default.
- W1644701606 hasPrimaryLocation W16447016061 @default.
- W1644701606 hasRelatedWork W1985334063 @default.
- W1644701606 hasRelatedWork W2054124615 @default.
- W1644701606 hasRelatedWork W2101239713 @default.
- W1644701606 hasRelatedWork W2109132618 @default.
- W1644701606 hasRelatedWork W2111193199 @default.
- W1644701606 hasRelatedWork W2126026362 @default.
- W1644701606 hasRelatedWork W2520347299 @default.
- W1644701606 hasRelatedWork W2520382090 @default.
- W1644701606 hasRelatedWork W3015143508 @default.
- W1644701606 hasRelatedWork W3217179084 @default.
- W1644701606 hasVolume "36" @default.
- W1644701606 isParatext "false" @default.
- W1644701606 isRetracted "false" @default.
- W1644701606 magId "1644701606" @default.
- W1644701606 workType "article" @default.