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- W1645187858 abstract "Summary from only given. We show a tunable MEMS grating design which permits analog control over the diffraction angle. This is accomplished by analog actuation of the grating beams in the lateral direction. Compared to other tunable grating implementations (e.g. the grating light valve and the polychromator), our device trades deflection range for angular resolution. Applications for high resolution analog tunable gratings include microspectrometers, external cavity tunable lasers, and thermal compensators for wavelength multiplexer-demultiplexers. in this paper, we describe two implementations: electrostatic and piezoelectric." @default.
- W1645187858 created "2016-06-24" @default.
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- W1645187858 date "2003-06-25" @default.
- W1645187858 modified "2023-09-23" @default.
- W1645187858 title "Electrostatic and piezoelectric analog tunable diffractive gratings" @default.
- W1645187858 cites W1542868602 @default.
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- W1645187858 doi "https://doi.org/10.1109/cleo.2002.1033451" @default.
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