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- W1645230812 abstract "A mesh generation algorithm for a curved surface is proposed to investigate a complex structure on a semiconductor substrate. This algorithm relies on the advancing front method with scattered data interpolation through a NURBS (nonuniform rational B-spline) surface. This algorithm has been applied to a cell-based simulation and a level set simulation. The NURBS mesh according to our algorithm excellently represented the surface evolution of the topography." @default.
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- W1645230812 date "2002-11-07" @default.
- W1645230812 modified "2023-09-27" @default.
- W1645230812 title "A mesh generation algorithm for complex geometry [semiconductor process modelling]" @default.
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- W1645230812 doi "https://doi.org/10.1109/sispad.2000.871247" @default.
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