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• W1646133460 abstract "RF diode and RF magnetron sputtering of indium tin oxide (ITO), using the same deposition conditions, are compared for the fabrication of ITO/InP solar cells. Current-voltage, capacitance, and deep level transient spectroscopy (DLTS) measurements are presented. It is concluded that, for tie conditions studied, magnetron sputtering gives better results, although the cell performance is more dependent on predeposition plasma treatment than on the deposition mode. >" @default.
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• W1646133460 date "2002-12-09" @default.
• W1646133460 modified "2023-09-27" @default.
• W1646133460 title "Comparison of RF diode and magnetron sputtering for the fabrication of ITO/InP solar cells" @default.
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• W1646133460 doi "https://doi.org/10.1109/iciprm.1991.147321" @default.
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