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- W1646291341 endingPage "024905" @default.
- W1646291341 startingPage "024905" @default.
- W1646291341 abstract "Single crystalline aluminum nitride (AlN) is a key material for deep-ultraviolet light emitting devices. In the present study, high-quality single crystalline AlN films have been fabricated by nitriding α-Al2O3 with a precise control of driving force of nitridation reaction. This process provides the ⟨0001⟩-axis oriented AlN film as large as 50.8mm in diameter formed on (0001) and (112¯0) planes of α-Al2O3 substrates. The crystalline qualities of the films have the values of full width at half maximum of rocking curves using (0002) and (101¯0) planes of AlN for tilt and twist components as follows; Tilt=165arcsec and twist=540arcsec in the case of nitriding (0001) plane of α-Al2O3 and tilt=127arcsec and twist=237arcsec in the case of nitriding (112¯0) plane of α-Al2O3." @default.
- W1646291341 created "2016-06-24" @default.
- W1646291341 creator A5006274503 @default.
- W1646291341 creator A5027253786 @default.
- W1646291341 creator A5053835455 @default.
- W1646291341 creator A5074556088 @default.
- W1646291341 date "2006-07-15" @default.
- W1646291341 modified "2023-10-18" @default.
- W1646291341 title "Single crystalline aluminum nitride films fabricated by nitriding α-Al2O3" @default.
- W1646291341 cites W1567707718 @default.
- W1646291341 cites W1982029376 @default.
- W1646291341 cites W1988621393 @default.
- W1646291341 cites W1994062536 @default.
- W1646291341 cites W2004155942 @default.
- W1646291341 cites W2015814636 @default.
- W1646291341 cites W2020396838 @default.
- W1646291341 cites W2022697388 @default.
- W1646291341 cites W2030127699 @default.
- W1646291341 cites W2043022481 @default.
- W1646291341 cites W2057895326 @default.
- W1646291341 cites W2067200090 @default.
- W1646291341 cites W2079643374 @default.
- W1646291341 cites W2080130879 @default.
- W1646291341 cites W2105120488 @default.
- W1646291341 cites W2163283592 @default.
- W1646291341 cites W3021434776 @default.
- W1646291341 doi "https://doi.org/10.1063/1.2214217" @default.
- W1646291341 hasPublicationYear "2006" @default.
- W1646291341 type Work @default.
- W1646291341 sameAs 1646291341 @default.
- W1646291341 citedByCount "40" @default.
- W1646291341 countsByYear W16462913412012 @default.
- W1646291341 countsByYear W16462913412013 @default.
- W1646291341 countsByYear W16462913412014 @default.
- W1646291341 countsByYear W16462913412015 @default.
- W1646291341 countsByYear W16462913412016 @default.
- W1646291341 countsByYear W16462913412017 @default.
- W1646291341 countsByYear W16462913412018 @default.
- W1646291341 countsByYear W16462913412020 @default.
- W1646291341 countsByYear W16462913412021 @default.
- W1646291341 countsByYear W16462913412022 @default.
- W1646291341 crossrefType "journal-article" @default.
- W1646291341 hasAuthorship W1646291341A5006274503 @default.
- W1646291341 hasAuthorship W1646291341A5027253786 @default.
- W1646291341 hasAuthorship W1646291341A5053835455 @default.
- W1646291341 hasAuthorship W1646291341A5074556088 @default.
- W1646291341 hasConcept C13862629 @default.
- W1646291341 hasConcept C159985019 @default.
- W1646291341 hasConcept C191897082 @default.
- W1646291341 hasConcept C192562407 @default.
- W1646291341 hasConcept C194760766 @default.
- W1646291341 hasConcept C2779227376 @default.
- W1646291341 hasConcept C2780162792 @default.
- W1646291341 hasConcept C49040817 @default.
- W1646291341 hasConcept C513153333 @default.
- W1646291341 hasConceptScore W1646291341C13862629 @default.
- W1646291341 hasConceptScore W1646291341C159985019 @default.
- W1646291341 hasConceptScore W1646291341C191897082 @default.
- W1646291341 hasConceptScore W1646291341C192562407 @default.
- W1646291341 hasConceptScore W1646291341C194760766 @default.
- W1646291341 hasConceptScore W1646291341C2779227376 @default.
- W1646291341 hasConceptScore W1646291341C2780162792 @default.
- W1646291341 hasConceptScore W1646291341C49040817 @default.
- W1646291341 hasConceptScore W1646291341C513153333 @default.
- W1646291341 hasIssue "2" @default.
- W1646291341 hasLocation W16462913411 @default.
- W1646291341 hasOpenAccess W1646291341 @default.
- W1646291341 hasPrimaryLocation W16462913411 @default.
- W1646291341 hasRelatedWork W1967275212 @default.
- W1646291341 hasRelatedWork W1989977287 @default.
- W1646291341 hasRelatedWork W2024908392 @default.
- W1646291341 hasRelatedWork W2073736202 @default.
- W1646291341 hasRelatedWork W2081360232 @default.
- W1646291341 hasRelatedWork W2083354014 @default.
- W1646291341 hasRelatedWork W2091129523 @default.
- W1646291341 hasRelatedWork W4236361214 @default.
- W1646291341 hasRelatedWork W4245176418 @default.
- W1646291341 hasRelatedWork W45233796 @default.
- W1646291341 hasVolume "100" @default.
- W1646291341 isParatext "false" @default.
- W1646291341 isRetracted "false" @default.
- W1646291341 magId "1646291341" @default.
- W1646291341 workType "article" @default.