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- W1646688653 endingPage "2182" @default.
- W1646688653 startingPage "2182" @default.
- W1646688653 abstract "(Ba1−x,Srx)TiO3 (BST) films were deposited on Pt/Ti/SiO2/Si substrates with various Ti buffer layer thicknesses by metalorganic chemical vapor deposition. The deposition rate and surface morphologies of the BST films were strongly dependent on the titanium buffer layer thickness. The deposition rate of BST films linearly increases with increasing Ti thickness. Titanium diffusion through the platinum bottom electrode played an important role as a nucleation site for BST growth. The 50 nm thick BST films deposited on Pt/Ti/SiO2/Si substrates with a Ti thickness of 50 nm have a dielectric constant of 190 and a dissipation factor of 0.025 at 100 kHz. The films showed symmetrical J-V characteristics with respect to the bias polarity and leakage current density of 8.0×10−7 A/cm2 at an applied voltage of 1 V. The optimal thickness of the Ti buffer layer in Pt/Ti/SiO2/Si substrates is important to obtain good electrical properties of BST films." @default.
- W1646688653 created "2016-06-24" @default.
- W1646688653 creator A5002817638 @default.
- W1646688653 creator A5023589363 @default.
- W1646688653 date "1999-01-01" @default.
- W1646688653 modified "2023-10-11" @default.
- W1646688653 title "Characterization of (Ba[sub 1−x],Sr[sub x])TiO[sub 3] thin films deposited on Pt/Ti/SiO[sub 2]/Si substrates with different Ti buffer layer thicknesses" @default.
- W1646688653 cites W1967001897 @default.
- W1646688653 cites W1988347587 @default.
- W1646688653 cites W2007639632 @default.
- W1646688653 cites W2037404174 @default.
- W1646688653 cites W2054956272 @default.
- W1646688653 cites W2055908731 @default.
- W1646688653 cites W2063946385 @default.
- W1646688653 cites W2077133132 @default.
- W1646688653 cites W2082940317 @default.
- W1646688653 cites W2105537991 @default.
- W1646688653 doi "https://doi.org/10.1116/1.590889" @default.
- W1646688653 hasPublicationYear "1999" @default.
- W1646688653 type Work @default.
- W1646688653 sameAs 1646688653 @default.
- W1646688653 citedByCount "12" @default.
- W1646688653 countsByYear W16466886532014 @default.
- W1646688653 crossrefType "journal-article" @default.
- W1646688653 hasAuthorship W1646688653A5002817638 @default.
- W1646688653 hasAuthorship W1646688653A5023589363 @default.
- W1646688653 hasConcept C113196181 @default.
- W1646688653 hasConcept C133386390 @default.
- W1646688653 hasConcept C147789679 @default.
- W1646688653 hasConcept C151730666 @default.
- W1646688653 hasConcept C159985019 @default.
- W1646688653 hasConcept C161790260 @default.
- W1646688653 hasConcept C171250308 @default.
- W1646688653 hasConcept C17525397 @default.
- W1646688653 hasConcept C178790620 @default.
- W1646688653 hasConcept C185592680 @default.
- W1646688653 hasConcept C19067145 @default.
- W1646688653 hasConcept C191897082 @default.
- W1646688653 hasConcept C192562407 @default.
- W1646688653 hasConcept C2778836790 @default.
- W1646688653 hasConcept C2779227376 @default.
- W1646688653 hasConcept C2816523 @default.
- W1646688653 hasConcept C43617362 @default.
- W1646688653 hasConcept C49040817 @default.
- W1646688653 hasConcept C506065880 @default.
- W1646688653 hasConcept C518104683 @default.
- W1646688653 hasConcept C55493867 @default.
- W1646688653 hasConcept C57410435 @default.
- W1646688653 hasConcept C61048295 @default.
- W1646688653 hasConcept C64297162 @default.
- W1646688653 hasConcept C86803240 @default.
- W1646688653 hasConcept C97274863 @default.
- W1646688653 hasConceptScore W1646688653C113196181 @default.
- W1646688653 hasConceptScore W1646688653C133386390 @default.
- W1646688653 hasConceptScore W1646688653C147789679 @default.
- W1646688653 hasConceptScore W1646688653C151730666 @default.
- W1646688653 hasConceptScore W1646688653C159985019 @default.
- W1646688653 hasConceptScore W1646688653C161790260 @default.
- W1646688653 hasConceptScore W1646688653C171250308 @default.
- W1646688653 hasConceptScore W1646688653C17525397 @default.
- W1646688653 hasConceptScore W1646688653C178790620 @default.
- W1646688653 hasConceptScore W1646688653C185592680 @default.
- W1646688653 hasConceptScore W1646688653C19067145 @default.
- W1646688653 hasConceptScore W1646688653C191897082 @default.
- W1646688653 hasConceptScore W1646688653C192562407 @default.
- W1646688653 hasConceptScore W1646688653C2778836790 @default.
- W1646688653 hasConceptScore W1646688653C2779227376 @default.
- W1646688653 hasConceptScore W1646688653C2816523 @default.
- W1646688653 hasConceptScore W1646688653C43617362 @default.
- W1646688653 hasConceptScore W1646688653C49040817 @default.
- W1646688653 hasConceptScore W1646688653C506065880 @default.
- W1646688653 hasConceptScore W1646688653C518104683 @default.
- W1646688653 hasConceptScore W1646688653C55493867 @default.
- W1646688653 hasConceptScore W1646688653C57410435 @default.
- W1646688653 hasConceptScore W1646688653C61048295 @default.
- W1646688653 hasConceptScore W1646688653C64297162 @default.
- W1646688653 hasConceptScore W1646688653C86803240 @default.
- W1646688653 hasConceptScore W1646688653C97274863 @default.
- W1646688653 hasIssue "5" @default.
- W1646688653 hasLocation W16466886531 @default.
- W1646688653 hasOpenAccess W1646688653 @default.
- W1646688653 hasPrimaryLocation W16466886531 @default.
- W1646688653 hasRelatedWork W1942569092 @default.
- W1646688653 hasRelatedWork W2004819647 @default.
- W1646688653 hasRelatedWork W2012407918 @default.
- W1646688653 hasRelatedWork W2051869542 @default.
- W1646688653 hasRelatedWork W2053508813 @default.
- W1646688653 hasRelatedWork W2068069519 @default.
- W1646688653 hasRelatedWork W2074644152 @default.
- W1646688653 hasRelatedWork W2081126748 @default.
- W1646688653 hasRelatedWork W2353011522 @default.
- W1646688653 hasRelatedWork W4280616684 @default.
- W1646688653 hasVolume "17" @default.
- W1646688653 isParatext "false" @default.
- W1646688653 isRetracted "false" @default.
- W1646688653 magId "1646688653" @default.
- W1646688653 workType "article" @default.