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- W1649224778 abstract "Summary form only given. Presently GaAs metal semiconductor metal (MSM) photodetectors are used for most optical data link systems operating at about 780-850 nm. The MSMs are generally preferred over p-i-n structures due to their low capacitance per unit area. To compare the effect of different substrates for MSM detectors, identical 80 micron-diameter devices were fabricated both on Si and Si-on-insulator (SOI)." @default.
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- W1649224778 date "1996-06-02" @default.
- W1649224778 modified "2023-09-26" @default.
- W1649224778 title "Resonant cavity photodetectors in silicon-on-insulator" @default.
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