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- W1652454711 abstract "A phase switch based on switching between two twoportpassive networks with a phase difference of 180o is reported.Two RF MEMS single-pole-double-throw structures are used toselect the phase path. The fabrication is made on both highresistivitysilicon and quartz substrates using the eight-maskFBK-irst surface micromachining process. The measured phaseshift is 180o±5o in the frequency range 14−20 GHz on quartzwafers and in the range 8−20 Ghz on silicon wafers." @default.
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- W1652454711 date "2011-01-01" @default.
- W1652454711 modified "2023-09-27" @default.
- W1652454711 title "RF-MEMS uniplanar 180º Phase Switch based on switching between two out-of-phase paths" @default.
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