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- W1653058229 abstract "The time-of-flight (TOF) distributions of nonemissive Si atoms ejected from a KrF laser-ablated Si 3 N 4 ceramics target were measured by laser-induced fluorescence spectroscopy (LIF). Bimodal velocity distribution was observed and measured velocity at the peak of the distribution, which increased with fluence, reached 15 km/s at an ablation fluence of 3.0 J/cm 2 ." @default.
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- W1653058229 date "1995-08-01" @default.
- W1653058229 modified "2023-09-25" @default.
- W1653058229 title "Time-of-Flight Distributions of Si Atoms Ejected by KrF Laser Ablation of Si<sub> 3</sub>N<sub> 4</sub>" @default.
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- W1653058229 doi "https://doi.org/10.1143/jjap.34.4079" @default.
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