Matches in SemOpenAlex for { <https://semopenalex.org/work/W1654307765> ?p ?o ?g. }
Showing items 1 to 98 of
98
with 100 items per page.
- W1654307765 abstract "Abstract : Single crystal AlN films were grown by sputtering on single crystal (0001) oriented sapphire substrates. The substrate size was 25.4 x 9.0 x 2.0 mm. This size was chosen as a convenient size for the fabrication of UHF SAW frequency filters. The AlN was synthesized by reactive rf diode sputtering of a pure aluminum target in an ammonia atmosphere. Growth conditions were established which yielded clear, uniform, single crystal AlN films. Films were evaluated through microscopic examinations, interference spectrophotometric thickness measurement and electron channeling and X-ray diffractometer crystallographic analysis. Films ranged from 2 micrometers to 2.3 micrometers in thickness and were uniform to less than 0.1 micrometers across the long dimension of the substrate. Films were single crystal with the (0001) A1N direction parallel to the (0001) Al2O3 direction. Films were clear and smooth replicating the surface of the substrate. Twelve samples were delivered in accordance with the requirements of this program. Surface acoustic wave interdigital electrode transducers and delay lines were fabricated on samples identical to those delivered. Measurements of delay line performance at 201, 477, and 848 MHz were made to provide an estimate of the basic constants for surface acoustic wave excitation and wave propagation. Relatively low acoustic propagation loss was observed for all AlN on sapphire delay lines studied. (Author)" @default.
- W1654307765 created "2016-06-24" @default.
- W1654307765 creator A5065540058 @default.
- W1654307765 creator A5075831379 @default.
- W1654307765 date "1978-09-01" @default.
- W1654307765 modified "2023-09-26" @default.
- W1654307765 title "Fabrication of Sputtered Aluminum Nitride on Sapphire for Application in UHF SAW Frequency Filters." @default.
- W1654307765 doi "https://doi.org/10.21236/ada063396" @default.
- W1654307765 hasPublicationYear "1978" @default.
- W1654307765 type Work @default.
- W1654307765 sameAs 1654307765 @default.
- W1654307765 citedByCount "0" @default.
- W1654307765 crossrefType "report" @default.
- W1654307765 hasAuthorship W1654307765A5065540058 @default.
- W1654307765 hasAuthorship W1654307765A5075831379 @default.
- W1654307765 hasConcept C111368507 @default.
- W1654307765 hasConcept C120665830 @default.
- W1654307765 hasConcept C121332964 @default.
- W1654307765 hasConcept C127313418 @default.
- W1654307765 hasConcept C136525101 @default.
- W1654307765 hasConcept C142724271 @default.
- W1654307765 hasConcept C159985019 @default.
- W1654307765 hasConcept C162954803 @default.
- W1654307765 hasConcept C171250308 @default.
- W1654307765 hasConcept C185592680 @default.
- W1654307765 hasConcept C19067145 @default.
- W1654307765 hasConcept C192562407 @default.
- W1654307765 hasConcept C194760766 @default.
- W1654307765 hasConcept C199360897 @default.
- W1654307765 hasConcept C204787440 @default.
- W1654307765 hasConcept C22423302 @default.
- W1654307765 hasConcept C26771246 @default.
- W1654307765 hasConcept C2777289219 @default.
- W1654307765 hasConcept C2779227376 @default.
- W1654307765 hasConcept C2780064504 @default.
- W1654307765 hasConcept C2781285689 @default.
- W1654307765 hasConcept C39546656 @default.
- W1654307765 hasConcept C41008148 @default.
- W1654307765 hasConcept C49040817 @default.
- W1654307765 hasConcept C520434653 @default.
- W1654307765 hasConcept C71924100 @default.
- W1654307765 hasConcept C73922627 @default.
- W1654307765 hasConcept C8010536 @default.
- W1654307765 hasConceptScore W1654307765C111368507 @default.
- W1654307765 hasConceptScore W1654307765C120665830 @default.
- W1654307765 hasConceptScore W1654307765C121332964 @default.
- W1654307765 hasConceptScore W1654307765C127313418 @default.
- W1654307765 hasConceptScore W1654307765C136525101 @default.
- W1654307765 hasConceptScore W1654307765C142724271 @default.
- W1654307765 hasConceptScore W1654307765C159985019 @default.
- W1654307765 hasConceptScore W1654307765C162954803 @default.
- W1654307765 hasConceptScore W1654307765C171250308 @default.
- W1654307765 hasConceptScore W1654307765C185592680 @default.
- W1654307765 hasConceptScore W1654307765C19067145 @default.
- W1654307765 hasConceptScore W1654307765C192562407 @default.
- W1654307765 hasConceptScore W1654307765C194760766 @default.
- W1654307765 hasConceptScore W1654307765C199360897 @default.
- W1654307765 hasConceptScore W1654307765C204787440 @default.
- W1654307765 hasConceptScore W1654307765C22423302 @default.
- W1654307765 hasConceptScore W1654307765C26771246 @default.
- W1654307765 hasConceptScore W1654307765C2777289219 @default.
- W1654307765 hasConceptScore W1654307765C2779227376 @default.
- W1654307765 hasConceptScore W1654307765C2780064504 @default.
- W1654307765 hasConceptScore W1654307765C2781285689 @default.
- W1654307765 hasConceptScore W1654307765C39546656 @default.
- W1654307765 hasConceptScore W1654307765C41008148 @default.
- W1654307765 hasConceptScore W1654307765C49040817 @default.
- W1654307765 hasConceptScore W1654307765C520434653 @default.
- W1654307765 hasConceptScore W1654307765C71924100 @default.
- W1654307765 hasConceptScore W1654307765C73922627 @default.
- W1654307765 hasConceptScore W1654307765C8010536 @default.
- W1654307765 hasLocation W16543077651 @default.
- W1654307765 hasOpenAccess W1654307765 @default.
- W1654307765 hasPrimaryLocation W16543077651 @default.
- W1654307765 hasRelatedWork W1571305915 @default.
- W1654307765 hasRelatedWork W1657327026 @default.
- W1654307765 hasRelatedWork W1968095957 @default.
- W1654307765 hasRelatedWork W1990055779 @default.
- W1654307765 hasRelatedWork W2002727358 @default.
- W1654307765 hasRelatedWork W2011579060 @default.
- W1654307765 hasRelatedWork W2016049422 @default.
- W1654307765 hasRelatedWork W2041971188 @default.
- W1654307765 hasRelatedWork W2051864324 @default.
- W1654307765 hasRelatedWork W2107174137 @default.
- W1654307765 hasRelatedWork W2108728884 @default.
- W1654307765 hasRelatedWork W2116726768 @default.
- W1654307765 hasRelatedWork W2144046512 @default.
- W1654307765 hasRelatedWork W2158532360 @default.
- W1654307765 hasRelatedWork W2165885955 @default.
- W1654307765 hasRelatedWork W2291529928 @default.
- W1654307765 hasRelatedWork W2333678154 @default.
- W1654307765 hasRelatedWork W2535369052 @default.
- W1654307765 hasRelatedWork W2547354239 @default.
- W1654307765 hasRelatedWork W2098508315 @default.
- W1654307765 isParatext "false" @default.
- W1654307765 isRetracted "false" @default.
- W1654307765 magId "1654307765" @default.
- W1654307765 workType "report" @default.