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- W1657702891 abstract "Summary form only given. It is usually assumed that capacitive discharges are a strictly electrostatic phenomenon, so that magnetic fields are negligible unless externally applied and the only electric fields are those determined by solving Poisson's equation. These are reasonable assumptions for the relatively low frequencies (e.g., 13.56 MHz) and moderate areas (e.g. 20 cm electrode diameter) discharges that are in wide use. However, there is now interest in the use of substantially higher frequencies (e.g. 100 MHz) and larger areas (e.g. 50 cm electrode diameter). In this paper we show that it is generally not safe to neglect electromagnetic effects in these cases. We make use of a predominantly analytic model in which the capacitive discharge is modelled as a plasma loaded waveguide, with vacuum regions adjacent to the electrodes representing the sheaths. In this model, the excitation is applied at the outer periphery of the planar electrodes, and the fields propagate inwards as a surface wave. Provided the wave length of the surface wave is large compared with the electrode diameter, and skin effects in the bulk plasma are not significant, this model predicts a uniform current density directed normal to the electrode surfaces. The onset of either skin effects or finite wavelength effects introduces currents in the plasma parallel to the electrode surfaces, and under these conditions there is also non-uniform power deposition, which may be expected to produce non-uniform plasma density." @default.
- W1657702891 created "2016-06-24" @default.
- W1657702891 creator A5021385616 @default.
- W1657702891 creator A5046954629 @default.
- W1657702891 creator A5065389810 @default.
- W1657702891 creator A5067325469 @default.
- W1657702891 creator A5085305605 @default.
- W1657702891 date "2003-06-25" @default.
- W1657702891 modified "2023-09-26" @default.
- W1657702891 title "Standing wave and skin effects in large area, high frequency capacitive discharges" @default.
- W1657702891 doi "https://doi.org/10.1109/plasma.2002.1030462" @default.
- W1657702891 hasPublicationYear "2003" @default.
- W1657702891 type Work @default.
- W1657702891 sameAs 1657702891 @default.
- W1657702891 citedByCount "0" @default.
- W1657702891 crossrefType "proceedings-article" @default.
- W1657702891 hasAuthorship W1657702891A5021385616 @default.
- W1657702891 hasAuthorship W1657702891A5046954629 @default.
- W1657702891 hasAuthorship W1657702891A5065389810 @default.
- W1657702891 hasAuthorship W1657702891A5067325469 @default.
- W1657702891 hasAuthorship W1657702891A5085305605 @default.
- W1657702891 hasConcept C119599485 @default.
- W1657702891 hasConcept C120665830 @default.
- W1657702891 hasConcept C121332964 @default.
- W1657702891 hasConcept C127413603 @default.
- W1657702891 hasConcept C149773537 @default.
- W1657702891 hasConcept C17525397 @default.
- W1657702891 hasConcept C192562407 @default.
- W1657702891 hasConcept C206755178 @default.
- W1657702891 hasConcept C49040817 @default.
- W1657702891 hasConcept C60799052 @default.
- W1657702891 hasConcept C62520636 @default.
- W1657702891 hasConcept C6260449 @default.
- W1657702891 hasConcept C82706917 @default.
- W1657702891 hasConcept C83581075 @default.
- W1657702891 hasConcept C84174578 @default.
- W1657702891 hasConcept C96716743 @default.
- W1657702891 hasConceptScore W1657702891C119599485 @default.
- W1657702891 hasConceptScore W1657702891C120665830 @default.
- W1657702891 hasConceptScore W1657702891C121332964 @default.
- W1657702891 hasConceptScore W1657702891C127413603 @default.
- W1657702891 hasConceptScore W1657702891C149773537 @default.
- W1657702891 hasConceptScore W1657702891C17525397 @default.
- W1657702891 hasConceptScore W1657702891C192562407 @default.
- W1657702891 hasConceptScore W1657702891C206755178 @default.
- W1657702891 hasConceptScore W1657702891C49040817 @default.
- W1657702891 hasConceptScore W1657702891C60799052 @default.
- W1657702891 hasConceptScore W1657702891C62520636 @default.
- W1657702891 hasConceptScore W1657702891C6260449 @default.
- W1657702891 hasConceptScore W1657702891C82706917 @default.
- W1657702891 hasConceptScore W1657702891C83581075 @default.
- W1657702891 hasConceptScore W1657702891C84174578 @default.
- W1657702891 hasConceptScore W1657702891C96716743 @default.
- W1657702891 hasLocation W16577028911 @default.
- W1657702891 hasOpenAccess W1657702891 @default.
- W1657702891 hasPrimaryLocation W16577028911 @default.
- W1657702891 hasRelatedWork W161696846 @default.
- W1657702891 hasRelatedWork W1972063636 @default.
- W1657702891 hasRelatedWork W1984117085 @default.
- W1657702891 hasRelatedWork W2025562592 @default.
- W1657702891 hasRelatedWork W2058098310 @default.
- W1657702891 hasRelatedWork W2061759285 @default.
- W1657702891 hasRelatedWork W2073742603 @default.
- W1657702891 hasRelatedWork W2100125289 @default.
- W1657702891 hasRelatedWork W2178590223 @default.
- W1657702891 hasRelatedWork W2314329841 @default.
- W1657702891 hasRelatedWork W2321178138 @default.
- W1657702891 hasRelatedWork W2325259074 @default.
- W1657702891 hasRelatedWork W2328674943 @default.
- W1657702891 hasRelatedWork W2328801590 @default.
- W1657702891 hasRelatedWork W2597047806 @default.
- W1657702891 hasRelatedWork W2998573885 @default.
- W1657702891 hasRelatedWork W2020683223 @default.
- W1657702891 hasRelatedWork W2827440942 @default.
- W1657702891 hasRelatedWork W2834053540 @default.
- W1657702891 hasRelatedWork W2866390593 @default.
- W1657702891 isParatext "false" @default.
- W1657702891 isRetracted "false" @default.
- W1657702891 magId "1657702891" @default.
- W1657702891 workType "article" @default.