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- W1659290499 abstract "An electrostatically actuated resonant varifocal mirror with a piezoresistive displacement sensor is reported. The focal length of the varifocal mirror is monitored by the sensor. The device is fabricated from a silicon-on-insulator wafer and a glass wafer. The p-type silicon region which is formed in n-type top silicon layer by boron ion implantation is used as the piezoresistive displacement sensor. The mirror surface profile and sensor signal are measured." @default.
- W1659290499 created "2016-06-24" @default.
- W1659290499 creator A5010315794 @default.
- W1659290499 creator A5015442273 @default.
- W1659290499 creator A5028354453 @default.
- W1659290499 creator A5052217295 @default.
- W1659290499 creator A5060173388 @default.
- W1659290499 creator A5085922314 @default.
- W1659290499 date "2015-08-01" @default.
- W1659290499 modified "2023-09-24" @default.
- W1659290499 title "Piezoresistive displacement sensor integrated in resonant varifocal mirror" @default.
- W1659290499 cites W1967188053 @default.
- W1659290499 cites W1999229816 @default.
- W1659290499 cites W2030857629 @default.
- W1659290499 cites W2163321594 @default.
- W1659290499 doi "https://doi.org/10.1109/omn.2015.7288895" @default.
- W1659290499 hasPublicationYear "2015" @default.
- W1659290499 type Work @default.
- W1659290499 sameAs 1659290499 @default.
- W1659290499 citedByCount "0" @default.
- W1659290499 crossrefType "proceedings-article" @default.
- W1659290499 hasAuthorship W1659290499A5010315794 @default.
- W1659290499 hasAuthorship W1659290499A5015442273 @default.
- W1659290499 hasAuthorship W1659290499A5028354453 @default.
- W1659290499 hasAuthorship W1659290499A5052217295 @default.
- W1659290499 hasAuthorship W1659290499A5060173388 @default.
- W1659290499 hasAuthorship W1659290499A5085922314 @default.
- W1659290499 hasConcept C107551265 @default.
- W1659290499 hasConcept C120665830 @default.
- W1659290499 hasConcept C121332964 @default.
- W1659290499 hasConcept C141354745 @default.
- W1659290499 hasConcept C15744967 @default.
- W1659290499 hasConcept C159985019 @default.
- W1659290499 hasConcept C160671074 @default.
- W1659290499 hasConcept C192562407 @default.
- W1659290499 hasConcept C198490522 @default.
- W1659290499 hasConcept C49040817 @default.
- W1659290499 hasConcept C53143962 @default.
- W1659290499 hasConcept C542102704 @default.
- W1659290499 hasConcept C544956773 @default.
- W1659290499 hasConceptScore W1659290499C107551265 @default.
- W1659290499 hasConceptScore W1659290499C120665830 @default.
- W1659290499 hasConceptScore W1659290499C121332964 @default.
- W1659290499 hasConceptScore W1659290499C141354745 @default.
- W1659290499 hasConceptScore W1659290499C15744967 @default.
- W1659290499 hasConceptScore W1659290499C159985019 @default.
- W1659290499 hasConceptScore W1659290499C160671074 @default.
- W1659290499 hasConceptScore W1659290499C192562407 @default.
- W1659290499 hasConceptScore W1659290499C198490522 @default.
- W1659290499 hasConceptScore W1659290499C49040817 @default.
- W1659290499 hasConceptScore W1659290499C53143962 @default.
- W1659290499 hasConceptScore W1659290499C542102704 @default.
- W1659290499 hasConceptScore W1659290499C544956773 @default.
- W1659290499 hasLocation W16592904991 @default.
- W1659290499 hasOpenAccess W1659290499 @default.
- W1659290499 hasPrimaryLocation W16592904991 @default.
- W1659290499 hasRelatedWork W1646562454 @default.
- W1659290499 hasRelatedWork W1960157728 @default.
- W1659290499 hasRelatedWork W1989650166 @default.
- W1659290499 hasRelatedWork W2002471063 @default.
- W1659290499 hasRelatedWork W2013853238 @default.
- W1659290499 hasRelatedWork W2030857629 @default.
- W1659290499 hasRelatedWork W2041203074 @default.
- W1659290499 hasRelatedWork W2063443642 @default.
- W1659290499 hasRelatedWork W2096171811 @default.
- W1659290499 hasRelatedWork W2101098067 @default.
- W1659290499 hasRelatedWork W2107858403 @default.
- W1659290499 hasRelatedWork W2331267161 @default.
- W1659290499 hasRelatedWork W2469862760 @default.
- W1659290499 hasRelatedWork W2544599271 @default.
- W1659290499 hasRelatedWork W2588837690 @default.
- W1659290499 hasRelatedWork W2781946998 @default.
- W1659290499 hasRelatedWork W2945916543 @default.
- W1659290499 hasRelatedWork W3128361144 @default.
- W1659290499 hasRelatedWork W2126930629 @default.
- W1659290499 hasRelatedWork W2956666666 @default.
- W1659290499 isParatext "false" @default.
- W1659290499 isRetracted "false" @default.
- W1659290499 magId "1659290499" @default.
- W1659290499 workType "article" @default.