Matches in SemOpenAlex for { <https://semopenalex.org/work/W166072177> ?p ?o ?g. }
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80
with 100 items per page.
- W166072177 endingPage "115" @default.
- W166072177 startingPage "110" @default.
- W166072177 abstract "Level set method, introduced by Osher and Sethian, is a highly robust and accurate computational technique for tracking of moving interfaces in etching, deposition and photolithography processes. It originates from the idea to view the moving front as a particular level set of a higher dimensional function, so the topological merging and breaking, sharp gradients and cusps can form naturally, and the effects of curvature can be easily incorporated. The corresponding equations of motion for the propagating surfaces, which resemble Hamilton-Jacobi equations with parabolic right-hand sides, can be solved using methods for solving hyperbolic conservation laws, ensuring in that the way correct entropy-satisfying solution. In this paper we describe an application of the sparse field method for solving level set equations in 3D anisotropic wet etching of silicon with potassium hydroxide (KOH). Angular dependence of the silicon etching rate is determined on the basis of the silicon crystal symmetry properties. Some examples illustrating developed methodology are given." @default.
- W166072177 created "2016-06-24" @default.
- W166072177 creator A5011272633 @default.
- W166072177 date "2008-07-02" @default.
- W166072177 modified "2023-09-24" @default.
- W166072177 title "3D level set anysotropic etching profile evolution simulations" @default.
- W166072177 cites W1238092070 @default.
- W166072177 cites W2090512191 @default.
- W166072177 cites W2092568788 @default.
- W166072177 cites W2142054519 @default.
- W166072177 cites W2171336223 @default.
- W166072177 cites W2798792863 @default.
- W166072177 cites W32649172 @default.
- W166072177 hasPublicationYear "2008" @default.
- W166072177 type Work @default.
- W166072177 sameAs 166072177 @default.
- W166072177 citedByCount "0" @default.
- W166072177 crossrefType "journal-article" @default.
- W166072177 hasAuthorship W166072177A5011272633 @default.
- W166072177 hasConcept C100460472 @default.
- W166072177 hasConcept C115961682 @default.
- W166072177 hasConcept C124504099 @default.
- W166072177 hasConcept C125269122 @default.
- W166072177 hasConcept C153008295 @default.
- W166072177 hasConcept C154945302 @default.
- W166072177 hasConcept C171250308 @default.
- W166072177 hasConcept C192562407 @default.
- W166072177 hasConcept C195065555 @default.
- W166072177 hasConcept C2524010 @default.
- W166072177 hasConcept C2779227376 @default.
- W166072177 hasConcept C31972630 @default.
- W166072177 hasConcept C33923547 @default.
- W166072177 hasConcept C41008148 @default.
- W166072177 hasConcept C49040817 @default.
- W166072177 hasConcept C544956773 @default.
- W166072177 hasConceptScore W166072177C100460472 @default.
- W166072177 hasConceptScore W166072177C115961682 @default.
- W166072177 hasConceptScore W166072177C124504099 @default.
- W166072177 hasConceptScore W166072177C125269122 @default.
- W166072177 hasConceptScore W166072177C153008295 @default.
- W166072177 hasConceptScore W166072177C154945302 @default.
- W166072177 hasConceptScore W166072177C171250308 @default.
- W166072177 hasConceptScore W166072177C192562407 @default.
- W166072177 hasConceptScore W166072177C195065555 @default.
- W166072177 hasConceptScore W166072177C2524010 @default.
- W166072177 hasConceptScore W166072177C2779227376 @default.
- W166072177 hasConceptScore W166072177C31972630 @default.
- W166072177 hasConceptScore W166072177C33923547 @default.
- W166072177 hasConceptScore W166072177C41008148 @default.
- W166072177 hasConceptScore W166072177C49040817 @default.
- W166072177 hasConceptScore W166072177C544956773 @default.
- W166072177 hasLocation W1660721771 @default.
- W166072177 hasOpenAccess W166072177 @default.
- W166072177 hasPrimaryLocation W1660721771 @default.
- W166072177 hasRelatedWork W1971103878 @default.
- W166072177 hasRelatedWork W1975354022 @default.
- W166072177 hasRelatedWork W1992352962 @default.
- W166072177 hasRelatedWork W2014116333 @default.
- W166072177 hasRelatedWork W2032773682 @default.
- W166072177 hasRelatedWork W2069448348 @default.
- W166072177 hasRelatedWork W2080251323 @default.
- W166072177 hasRelatedWork W2086837428 @default.
- W166072177 hasRelatedWork W2089371548 @default.
- W166072177 hasRelatedWork W2091323047 @default.
- W166072177 hasRelatedWork W2106703582 @default.
- W166072177 hasRelatedWork W2137014774 @default.
- W166072177 hasRelatedWork W2139936470 @default.
- W166072177 hasRelatedWork W2166025227 @default.
- W166072177 hasRelatedWork W2171628686 @default.
- W166072177 hasRelatedWork W2767568138 @default.
- W166072177 hasRelatedWork W2963624621 @default.
- W166072177 hasRelatedWork W3014457367 @default.
- W166072177 hasRelatedWork W3115155943 @default.
- W166072177 hasRelatedWork W99735970 @default.
- W166072177 isParatext "false" @default.
- W166072177 isRetracted "false" @default.
- W166072177 magId "166072177" @default.
- W166072177 workType "article" @default.