Matches in SemOpenAlex for { <https://semopenalex.org/work/W1661660519> ?p ?o ?g. }
Showing items 1 to 75 of
75
with 100 items per page.
- W1661660519 abstract "LIGA (German acronym of lithographie, galvanoformung (plating) and abformung (forming)) is a relatively new technology which offers a potential means of realising very accurate (sub-micron) and high aspect ratio structures. In this paper we show the application of the LIGA process to optoelectronic assembly applications." @default.
- W1661660519 created "2016-06-24" @default.
- W1661660519 creator A5022476454 @default.
- W1661660519 creator A5044923353 @default.
- W1661660519 creator A5061242061 @default.
- W1661660519 date "2002-11-27" @default.
- W1661660519 modified "2023-09-24" @default.
- W1661660519 title "Preliminary results on the use of LIGA in an optoelectronics application" @default.
- W1661660519 cites W1968440323 @default.
- W1661660519 doi "https://doi.org/10.1109/leos.1998.737723" @default.
- W1661660519 hasPublicationYear "2002" @default.
- W1661660519 type Work @default.
- W1661660519 sameAs 1661660519 @default.
- W1661660519 citedByCount "0" @default.
- W1661660519 crossrefType "proceedings-article" @default.
- W1661660519 hasAuthorship W1661660519A5022476454 @default.
- W1661660519 hasAuthorship W1661660519A5044923353 @default.
- W1661660519 hasAuthorship W1661660519A5061242061 @default.
- W1661660519 hasConcept C121332964 @default.
- W1661660519 hasConcept C136525101 @default.
- W1661660519 hasConcept C138885662 @default.
- W1661660519 hasConcept C142724271 @default.
- W1661660519 hasConcept C145695476 @default.
- W1661660519 hasConcept C171250308 @default.
- W1661660519 hasConcept C192562407 @default.
- W1661660519 hasConcept C204223013 @default.
- W1661660519 hasConcept C204787440 @default.
- W1661660519 hasConcept C2776985018 @default.
- W1661660519 hasConcept C41895202 @default.
- W1661660519 hasConcept C482391 @default.
- W1661660519 hasConcept C49040817 @default.
- W1661660519 hasConcept C71924100 @default.
- W1661660519 hasConcept C8058405 @default.
- W1661660519 hasConceptScore W1661660519C121332964 @default.
- W1661660519 hasConceptScore W1661660519C136525101 @default.
- W1661660519 hasConceptScore W1661660519C138885662 @default.
- W1661660519 hasConceptScore W1661660519C142724271 @default.
- W1661660519 hasConceptScore W1661660519C145695476 @default.
- W1661660519 hasConceptScore W1661660519C171250308 @default.
- W1661660519 hasConceptScore W1661660519C192562407 @default.
- W1661660519 hasConceptScore W1661660519C204223013 @default.
- W1661660519 hasConceptScore W1661660519C204787440 @default.
- W1661660519 hasConceptScore W1661660519C2776985018 @default.
- W1661660519 hasConceptScore W1661660519C41895202 @default.
- W1661660519 hasConceptScore W1661660519C482391 @default.
- W1661660519 hasConceptScore W1661660519C49040817 @default.
- W1661660519 hasConceptScore W1661660519C71924100 @default.
- W1661660519 hasConceptScore W1661660519C8058405 @default.
- W1661660519 hasLocation W16616605191 @default.
- W1661660519 hasOpenAccess W1661660519 @default.
- W1661660519 hasPrimaryLocation W16616605191 @default.
- W1661660519 hasRelatedWork W1577518616 @default.
- W1661660519 hasRelatedWork W1678617102 @default.
- W1661660519 hasRelatedWork W1834691738 @default.
- W1661660519 hasRelatedWork W1980699671 @default.
- W1661660519 hasRelatedWork W2020024008 @default.
- W1661660519 hasRelatedWork W2022578418 @default.
- W1661660519 hasRelatedWork W2034282582 @default.
- W1661660519 hasRelatedWork W2056693710 @default.
- W1661660519 hasRelatedWork W2069013940 @default.
- W1661660519 hasRelatedWork W2071101915 @default.
- W1661660519 hasRelatedWork W2109982116 @default.
- W1661660519 hasRelatedWork W2159756711 @default.
- W1661660519 hasRelatedWork W2165151279 @default.
- W1661660519 hasRelatedWork W2356953547 @default.
- W1661660519 hasRelatedWork W2391472534 @default.
- W1661660519 hasRelatedWork W2545186056 @default.
- W1661660519 hasRelatedWork W3021079184 @default.
- W1661660519 hasRelatedWork W3032769153 @default.
- W1661660519 hasRelatedWork W890641783 @default.
- W1661660519 hasRelatedWork W2470455681 @default.
- W1661660519 isParatext "false" @default.
- W1661660519 isRetracted "false" @default.
- W1661660519 magId "1661660519" @default.
- W1661660519 workType "article" @default.