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- W1662082777 abstract "This paper presents the micro-characterization results of a laser synthesized ceramic thermal sensor. The thermal sensor is formed in air at 300 K using a low pulse energy Nd:YAG laser. Sensor patterning was obtained by rastering the beam using a programmable x-y table. These sensors are a maximum surface area of 4 cm2 for testing purposes. Silicon-carbon-oxygen sensor compositions are synthesized as a second phase in an α-silicon dielectric substrate. These sensors are metal-like electro-conductors which exhibit linear resistivity versus temperature behavior over the range 80 K to 700 K. Above 700 K, the sensor shows a sensitivity to oxygen but is stable in hydrogen chloride environments. The particular sensor composition studied, SiC0.73O0.78 showed an amorphous structure both before and after accelerated-life testing. Applications for these ceramic solid state sensors include thermal detection in high temperature corrosive environments.This paper presents the micro-characterization results of a laser synthesized ceramic thermal sensor. The thermal sensor is formed in air at 300 K using a low pulse energy Nd:YAG laser. Sensor patterning was obtained by rastering the beam using a programmable x-y table. These sensors are a maximum surface area of 4 cm2 for testing purposes. Silicon-carbon-oxygen sensor compositions are synthesized as a second phase in an α-silicon dielectric substrate. These sensors are metal-like electro-conductors which exhibit linear resistivity versus temperature behavior over the range 80 K to 700 K. Above 700 K, the sensor shows a sensitivity to oxygen but is stable in hydrogen chloride environments. The particular sensor composition studied, SiC0.73O0.78 showed an amorphous structure both before and after accelerated-life testing. Applications for these ceramic solid state sensors include thermal detection in high temperature corrosive environments." @default.
- W1662082777 created "2016-06-24" @default.
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- W1662082777 date "1992-01-01" @default.
- W1662082777 modified "2023-09-26" @default.
- W1662082777 title "Characterization of a ceramic thermal sensor synthesized by a laser conversion process" @default.
- W1662082777 doi "https://doi.org/10.2351/1.5058509" @default.
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