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- W1663108584 endingPage "151" @default.
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- W1663108584 abstract "The miniaturization of the spatial dimensions of semiconductors is motivated by increased speed, reduced power consumption, and higher functional density of semiconductor devices and integrated circuits. The chapter discusses that the fundamental physical limits, which are almost exclusively in the quantum regime, represent boundaries of the scaling process. It is a vital, important part of present and future semiconductor research to advance materials science to reduce the spatial dimensions of semiconductor structures and, at the same time, to realize and understand the physical mechanisms that impose fundamental limits on scaling. It resents the electronic, optical, and structural properties of doping distributions in semiconductors that are scaled down in one dimension to their ultimate spatial limit. This limit is reached, if the dopants are confined to a single or few monolayers of the semiconductor lattice. Experimentally, δ-doped semiconductors are obtained by crystal growth interruption and subsequent evaporation of dopants on the non-growing epitaxial crystal surface. After the growth suspension, which can typically last seconds up to several minute, the epitaxial growth is resumed. The optical characteristics of doping superlattices are greatly improved by using the δ-doping technique. The improved doping superlattice structure, which has sawtooth-shaped band-edge potentials, allows fabricating the first doping superlattice light-emitting diodes, lasers, and tunable lasers." @default.
- W1663108584 created "2016-06-24" @default.
- W1663108584 creator A5010173462 @default.
- W1663108584 date "1994-01-01" @default.
- W1663108584 modified "2023-10-02" @default.
- W1663108584 title "Chapter 1 Delta-Doping of Semiconductors: Electronic, Optical, and Structural Properties of Materials and Devices" @default.
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