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- W1663172590 abstract "Single phase of multicomponent oxide ZrTiO4 film could be prepared through surface sol-gel route simply by coating the mixture of 100 mM zirconium butoxide and titanium butoxide on <TEX>$Pt/Ti/SiO_2Si(100)$</TEX> substrate, following pyro lysis at <TEX>$450^{circ}C$</TEX>, and annealing it at 770 <TEX>$^{circ}C.$</TEX> The dielectric constant of the film was reduced as the film thickness decreased due to of the interfacial effects caused by layer/electrode and a few voids inside the multilayer. However, the dielectric property was independent of applied dc bias sweeps voltage (-2 to +2 V).The dielectric constant of bulk film, 31.9, estimated using series-connected capacitor model was independent of film thickness and frequency in the measurement range, but theoretical interfacial thickness, ti, was dependent on the frequency. It reached a saturated ti value, <TEX>$6.9{AA}$</TEX>, at high frequency by extraction of some capacitance component formed at low frequency range. The dielectric constant of bulk ZrTiO4 pellet-shaped material was 33.7 and very stable with frequency promising as good applicable devices." @default.
- W1663172590 created "2016-06-24" @default.
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- W1663172590 date "2002-05-20" @default.
- W1663172590 modified "2023-10-10" @default.
- W1663172590 title "Zirconium Titanate Thin FIlm Prepared by Surface Sol-Gel Process and Effects of Thickness on Dielectric Property" @default.
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- W1663172590 doi "https://doi.org/10.5012/bkcs.2002.23.5.741" @default.
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