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• W1663987446 abstract "The effects of 180 keV Ar/sup +/, B/sup +/, P/sup +/, and As/sup +/ implantation on the dielectric properties of polyethylene terephthalate (PET) film have been studied. It is shown that PET film subjected to ion implantation exhibits a sharp relaxation peak on the curve of dielectric loss tangent vs. frequency and its capacitance is enhanced by 9.6 times. The depth of ion implantation is only 0.73 mu m at a 38 mu m thickness of PET film. Finally, the dielectric behavior of ion-implanted PET is interpreted as the tunneling transport of electrons and the space charge effect. >" @default.
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• W1663987446 date "2002-12-09" @default.
• W1663987446 modified "2023-09-27" @default.
• W1663987446 title "On the mechanism of dielectric loss in ion-implanted PET film" @default.
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• W1663987446 doi "https://doi.org/10.1109/icpadm.1991.172261" @default.
• W1663987446 hasPublicationYear "2002" @default.
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