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- W1665399814 abstract "HEMT (High Electron Mobility Transistor) is a very promising device for ultra-high-speed LSI/VLSI due to the super-mobility GaAs/AlGaAs heterojunction structure. Recent progress and technical challenges in HEMT technology for high performance VLSI are presented with the focus on material, self-alignment device fabrication, and HEMT LSI implementations." @default.
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- W1665399814 date "1987-01-01" @default.
- W1665399814 modified "2023-10-06" @default.
- W1665399814 title "Progress and Challenges in HEMT LSI Technology" @default.
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- W1665399814 doi "https://doi.org/10.1007/978-3-642-72970-6_36" @default.
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