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• W1665702975 abstract "Mach-Zehnder electro-optic waveguide modulators were fabricated based on BaTiO3 (BTO)-SrTiO3 (STO) multilayer thin film stacks grown on single crystal MgO substrates by pulsed laser deposition. X-ray diffraction measurements confirmed the formation of a BTO-STO superlattice with periodicity of 11unit cells. Strip-loaded waveguides were formed by patterning a SixNy film deposited onto the BTO-STO stack while Al electrodes of 3mm length and 13μm separation were fabricated in the vicinity of the active waveguide arm of the Mach-Zehnder modulator. An effective electro-optic coefficient of 73pm∕V at 1550nm wavelength was determined for the deposited BTO-STO superlattice by measuring the output intensity as a function of applied electric field." @default.
• W1665702975 created "2016-06-24" @default.
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• W1665702975 date "2006-12-11" @default.
• W1665702975 modified "2023-09-23" @default.
• W1665702975 title "Ba Ti O 3 – Sr Ti O 3 multilayer thin film electro-optic waveguide modulator" @default.
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• W1665702975 doi "https://doi.org/10.1063/1.2404982" @default.
• W1665702975 hasPublicationYear "2006" @default.
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