Matches in SemOpenAlex for { <https://semopenalex.org/work/W1667835982> ?p ?o ?g. }
Showing items 1 to 87 of
87
with 100 items per page.
- W1667835982 abstract "Implementation of Cu interconnects into Silicon Integrated Circuits (IC’s) has been instrumental in the continuing improvement of IC device performance. Copper as a well known Gate Oxide Integrity (GOI) killer [1, 2] requires extensive protocols to minimize the possibility of cross contamination. Despite such protocols the risk for cross contamination exists, and consequently there is the need for in‐line Cu cross‐contamination detection metrology. Preferably the metrology will be non‐destructive, fast, and capable of mapping on product wafers. Up to now the most common approaches for monitoring Cu contamination in IC fabrication lines either measure Cu in the bulk Si, which is not applicable to Cu cross‐contamination monitoring because Back‐End‐of‐the‐Line thermal budgets restrict the ability to diffuse the surface Cu into the bulk Si; or the techniques are not optimal for in‐line monitoring due to their destructive, time‐consuming, or costly nature. In this work we demonstrate for the first time the application of the ac‐Surface Photo Voltage (ac‐SPV) surface lifetime approach [3] to in‐line, full wafer coverage mapping of low level (<1E9 cm‐2) surface Cu contamination. The low level sensitivity is achieved through integration of a novel preferential surface Cu activation procedure into a production ready metrology system. Furthermore, because the metrology is non‐contact (utilizing edge‐grip handling) and non‐destructive, it is directly applicable to measurement of production wafers. In‐line fab data acquired using this metrology is presented and compared to data from Inductively Coupled Plasma Mass Spectroscopy (ICP‐MS)." @default.
- W1667835982 created "2016-06-24" @default.
- W1667835982 creator A5020921372 @default.
- W1667835982 creator A5023601997 @default.
- W1667835982 creator A5040716057 @default.
- W1667835982 creator A5041695792 @default.
- W1667835982 creator A5063678721 @default.
- W1667835982 creator A5068344917 @default.
- W1667835982 creator A5081979530 @default.
- W1667835982 creator A5086064222 @default.
- W1667835982 date "2009-01-01" @default.
- W1667835982 modified "2023-10-13" @default.
- W1667835982 title "Application Of The SPV-based Surface Lifetime Technique To In-Line Monitoring Of Surface Cu Contamination" @default.
- W1667835982 doi "https://doi.org/10.1063/1.3251264" @default.
- W1667835982 hasPublicationYear "2009" @default.
- W1667835982 type Work @default.
- W1667835982 sameAs 1667835982 @default.
- W1667835982 citedByCount "0" @default.
- W1667835982 crossrefType "proceedings-article" @default.
- W1667835982 hasAuthorship W1667835982A5020921372 @default.
- W1667835982 hasAuthorship W1667835982A5023601997 @default.
- W1667835982 hasAuthorship W1667835982A5040716057 @default.
- W1667835982 hasAuthorship W1667835982A5041695792 @default.
- W1667835982 hasAuthorship W1667835982A5063678721 @default.
- W1667835982 hasAuthorship W1667835982A5068344917 @default.
- W1667835982 hasAuthorship W1667835982A5081979530 @default.
- W1667835982 hasAuthorship W1667835982A5086064222 @default.
- W1667835982 hasBestOaLocation W16678359821 @default.
- W1667835982 hasConcept C112570922 @default.
- W1667835982 hasConcept C120665830 @default.
- W1667835982 hasConcept C121332964 @default.
- W1667835982 hasConcept C127413603 @default.
- W1667835982 hasConcept C160671074 @default.
- W1667835982 hasConcept C18903297 @default.
- W1667835982 hasConcept C192562407 @default.
- W1667835982 hasConcept C195766429 @default.
- W1667835982 hasConcept C198352243 @default.
- W1667835982 hasConcept C2524010 @default.
- W1667835982 hasConcept C33923547 @default.
- W1667835982 hasConcept C49040817 @default.
- W1667835982 hasConcept C530198007 @default.
- W1667835982 hasConcept C78519656 @default.
- W1667835982 hasConcept C86803240 @default.
- W1667835982 hasConcept C99862985 @default.
- W1667835982 hasConceptScore W1667835982C112570922 @default.
- W1667835982 hasConceptScore W1667835982C120665830 @default.
- W1667835982 hasConceptScore W1667835982C121332964 @default.
- W1667835982 hasConceptScore W1667835982C127413603 @default.
- W1667835982 hasConceptScore W1667835982C160671074 @default.
- W1667835982 hasConceptScore W1667835982C18903297 @default.
- W1667835982 hasConceptScore W1667835982C192562407 @default.
- W1667835982 hasConceptScore W1667835982C195766429 @default.
- W1667835982 hasConceptScore W1667835982C198352243 @default.
- W1667835982 hasConceptScore W1667835982C2524010 @default.
- W1667835982 hasConceptScore W1667835982C33923547 @default.
- W1667835982 hasConceptScore W1667835982C49040817 @default.
- W1667835982 hasConceptScore W1667835982C530198007 @default.
- W1667835982 hasConceptScore W1667835982C78519656 @default.
- W1667835982 hasConceptScore W1667835982C86803240 @default.
- W1667835982 hasConceptScore W1667835982C99862985 @default.
- W1667835982 hasLocation W16678359821 @default.
- W1667835982 hasOpenAccess W1667835982 @default.
- W1667835982 hasPrimaryLocation W16678359821 @default.
- W1667835982 hasRelatedWork W1580113753 @default.
- W1667835982 hasRelatedWork W1642400831 @default.
- W1667835982 hasRelatedWork W1642954070 @default.
- W1667835982 hasRelatedWork W1656814245 @default.
- W1667835982 hasRelatedWork W1845703058 @default.
- W1667835982 hasRelatedWork W1967395618 @default.
- W1667835982 hasRelatedWork W2040262641 @default.
- W1667835982 hasRelatedWork W2072431788 @default.
- W1667835982 hasRelatedWork W2116542580 @default.
- W1667835982 hasRelatedWork W2119508996 @default.
- W1667835982 hasRelatedWork W2128264160 @default.
- W1667835982 hasRelatedWork W2138097213 @default.
- W1667835982 hasRelatedWork W2138366676 @default.
- W1667835982 hasRelatedWork W2161323141 @default.
- W1667835982 hasRelatedWork W2331265840 @default.
- W1667835982 hasRelatedWork W2334622145 @default.
- W1667835982 hasRelatedWork W2729752926 @default.
- W1667835982 hasRelatedWork W2895927807 @default.
- W1667835982 hasRelatedWork W3117317962 @default.
- W1667835982 hasRelatedWork W3159251729 @default.
- W1667835982 isParatext "false" @default.
- W1667835982 isRetracted "false" @default.
- W1667835982 magId "1667835982" @default.
- W1667835982 workType "article" @default.