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• W1668656295 abstract "The Electrochemical Society, Inc. 2007. All rights reserved. Except as provided under U.S. copyright law, this work may not be reproduced, resold, distributed, or modified without the express permission of The Electrochemical Society (ECS). The archival version of this work was published in Journal of the Electrochemical Society Vol. 154 Issue 4 (2007): H325-H330" @default.
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• W1668656295 date "2007-01-01" @default.
• W1668656295 modified "2023-09-24" @default.
• W1668656295 title "Hydrogen-free SiCN Films Obtained by Electron Cyclotron Resonance Plasma" @default.
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• W1668656295 doi "https://doi.org/10.1149/1.2472559" @default.
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