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- W1673049062 abstract "In an effort to evaluate the minority carrier lifetimes in CVD-epitaxially grown layers in their dependence on the CVD process variables, the absolute spectral LBIC method was found to be the only available method capable of yielding both lifetime and surface recombination velocity in layers, independent of the resistivity of this layer or that of the substrate, as long as they are separated by a pn-junction. With this method, it was not only possible to determine the minority carrier lifetimes in as-grown epi-layers, but to observe their changes through the device fabrication processes. In addition, it was possible for the first time to determine the lifetimes in the alloy-regrowth p(+) layers of base high/low junction structures." @default.
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- W1673049062 date "1984-01-01" @default.
- W1673049062 modified "2023-09-29" @default.
- W1673049062 title "Lifetimes in Si CVD-epitaxial and other layers determined by spectral LBIC" @default.
- W1673049062 hasPublicationYear "1984" @default.
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