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- W1675525129 abstract "In this paper, a personal-CIM system to improve the efficiency of experiments on ULSI development in the ULSI R&D line is described. We have developed the personal-CIM system which works in cooperation with a Manufacturing Execution System (MES) in order to reduce the preparation time for an experiment performed by each engineer on semiconductor technology. The personal-CIM system is realized by developing an acceptance agent, an inspection agent and a report agent. As the personal-CIM system acts as a private secretary who examines faithfully variable conditions in the ULSI R&D line instead of each engineer, the engineer gets various information in a timely manner that is needed to prepare for his or her experiment." @default.
- W1675525129 created "2016-06-24" @default.
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- W1675525129 date "2003-01-20" @default.
- W1675525129 modified "2023-09-25" @default.
- W1675525129 title "Personal-CIM system to monitor ULSI R&D line for process engineers" @default.
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- W1675525129 doi "https://doi.org/10.1109/issm.1999.808803" @default.
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