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- W1677029478 abstract "This paper gives a brief review of both the MUMPs technology and the common micro-machined parallel plate tunable capacitors. Further, several factors that contribute in creating discrepancy between designed and measured capacitance and/or degrading the quality factor of the MEMS variable capacitor are discussed. Finally, a novel and extremely simple relation that anticipates the value of the quality factor of the fabricated variable capacitors is introduced." @default.
- W1677029478 created "2016-06-24" @default.
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- W1677029478 date "2004-12-23" @default.
- W1677029478 modified "2023-09-24" @default.
- W1677029478 title "Q-factor estimation of fabricated MEMS parallel-plate variable capacitors in MUMPs" @default.
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- W1677029478 doi "https://doi.org/10.1109/newcas.2004.1359034" @default.
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