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- W167804644 abstract "The work presented in this thesis deals with reactive magnetron sputtering processes of metal oxides with a prime focus on high power impulse magnetron sputtering (HiPIMS). The aim of the research ..." @default.
- W167804644 created "2016-06-24" @default.
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- W167804644 date "2013-01-01" @default.
- W167804644 modified "2023-09-27" @default.
- W167804644 title "Reactive High Power Impulse Magnetron Sputtering of Metal Oxides" @default.
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