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- W1678617102 abstract "Although traditional silicon planar technology has generated the field of microoptics, it is able to produce only a few shapes. To avoid that, many non-conventional alternative technologies, based especially on different polymeric materials, are presently investigated. This paper reports on the experimental study of three such technologies; LiGA based techniques, gray-tone lithography and embossing alternatives in polymers." @default.
- W1678617102 created "2016-06-24" @default.
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- W1678617102 date "2002-11-08" @default.
- W1678617102 modified "2023-10-18" @default.
- W1678617102 title "Non-conventional technologies for micro-optical components: a survey" @default.
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- W1678617102 doi "https://doi.org/10.1109/smicnd.2000.889150" @default.
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