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- W1681041613 abstract "Dry processing - both etching and deposition - and present/future trends in semiconductor technology are discussed. In addition to a description of the basic apparatus, terminology, advantages, glow discharge phenomena, gas-surface chemistries, and key operational parameters for both dry etching and plasma deposition processes, a comprehensive survey of dry processing equipment (via vendor listing) is also included. The following topics are also discussed: fine-line photolithography, low-temperature processing, packaging for dense VLSI die, the role of integrated optics, and VLSI and technology innovations." @default.
- W1681041613 created "2016-06-24" @default.
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- W1681041613 date "1982-03-01" @default.
- W1681041613 modified "2023-09-26" @default.
- W1681041613 title "High density circuit technology, part 3" @default.
- W1681041613 hasPublicationYear "1982" @default.
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