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- W168616100 abstract "The reliability and performance of a low-voltage metal-tometal contact shunt RF MEMS switch is investigated. The switch featured is compatible with standard MMIC processing steps. The best rf performance shows insertion loss of less that 0.1 dB and isolation of greater than 22 dB for all frequencies up to 40 GHz. Switching times are less than 25 μs. Lifetimes of 3×10 8 cycles have been achieved for tests with no input signal, and 1.3×10 6 cycles for tests with continuous input. The failure mechanism is degradation of the metal-to-metal contact, and stiction problems have been avoided through careful processing and testing conditions." @default.
- W168616100 created "2016-06-24" @default.
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- W168616100 date "2002-01-01" @default.
- W168616100 modified "2023-09-27" @default.
- W168616100 title "Reliability Study of Low-Voltage RF MEMS Switches" @default.
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