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- W1690023112 abstract "The elemental composition of thin Fe-Ni alloy films deposited on silicon substrates were determined by electron probe microanalysis with an energy dispersive spectrometer using the STRATAGem software. The work was part of ample inter-laboratory comparisons organized in the frame of CCQM/SAWG (Consultative Committee for Amount of Substance/Surface Analysis Working Group). Therefore, the evaluation of the measurement uncertainties is treated in detail. By having the mass coverage and estimating a layer density, the layer thickness could be derived. Copyright © 2012 John Wiley & Sons, Ltd." @default.
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- W1690023112 date "2012-04-18" @default.
- W1690023112 modified "2023-10-16" @default.
- W1690023112 title "Energy dispersive electron probe microanalysis (ED-EPMA) of elemental composition and thickness of Fe-Ni alloy films" @default.
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- W1690023112 doi "https://doi.org/10.1002/sia.4975" @default.
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