Matches in SemOpenAlex for { <https://semopenalex.org/work/W17065125> ?p ?o ?g. }
Showing items 1 to 59 of
59
with 100 items per page.
- W17065125 abstract "Results of experimental investigations on the relationship between nanoscale morphology of carbon doped hydrogenated silicon-oxide (SiOCH) low-k films and their electron spectrum of defect states are presented. The SiOCH films have been deposited using trimethylsilane (3MS) - oxygen mixture in a 13.56 MHz plasma enhanced chemical vapor deposition (PECVD) system at variable RF power densities (from 1.3 to 2.6 W/cm2) and gas pressures of 3, 4, and 5 Torr. The atomic structure of the SiOCH films is a mixture of amorphous-nanocrystalline SiO2-like and SiC-like phases. Results of the FTIR spectroscopy and atomic force microscopy suggest that the volume fraction of the SiC-like phase increases from ∼0.2 to 0.4 with RF power. The average size of the nanoscale surface morphology elements of the SiO2-like matrix can be controlled by the RF power density and source gas flow rates. Electron density of the defect states N(E) of the SiOCH films has been investigated with the DLTS technique in the energy range up to 0.6 eV from the bottom of the conduction band. Distinct N(E) peaks at 0.25 - 0.35 eV and 0.42 - 0.52 eV below the conduction band bottom have been observed. The first N(E) peak is identified as originated from E1-like centers in the SiC-like phase. The volume density of the defects can vary from 1011 - 1017 cm-3 depending on specific conditions of the PECVD process." @default.
- W17065125 created "2016-06-24" @default.
- W17065125 creator A5002703839 @default.
- W17065125 creator A5026135542 @default.
- W17065125 creator A5029593812 @default.
- W17065125 creator A5031128838 @default.
- W17065125 date "2003-01-01" @default.
- W17065125 modified "2023-09-27" @default.
- W17065125 title "Nano-scale morphology and electron spectrum of defect states in low-k SiOCH films" @default.
- W17065125 hasPublicationYear "2003" @default.
- W17065125 type Work @default.
- W17065125 sameAs 17065125 @default.
- W17065125 citedByCount "0" @default.
- W17065125 crossrefType "journal-article" @default.
- W17065125 hasAuthorship W17065125A5002703839 @default.
- W17065125 hasAuthorship W17065125A5026135542 @default.
- W17065125 hasAuthorship W17065125A5029593812 @default.
- W17065125 hasAuthorship W17065125A5031128838 @default.
- W17065125 hasConcept C113196181 @default.
- W17065125 hasConcept C171250308 @default.
- W17065125 hasConcept C185592680 @default.
- W17065125 hasConcept C192562407 @default.
- W17065125 hasConcept C38347018 @default.
- W17065125 hasConcept C43617362 @default.
- W17065125 hasConcept C57410435 @default.
- W17065125 hasConceptScore W17065125C113196181 @default.
- W17065125 hasConceptScore W17065125C171250308 @default.
- W17065125 hasConceptScore W17065125C185592680 @default.
- W17065125 hasConceptScore W17065125C192562407 @default.
- W17065125 hasConceptScore W17065125C38347018 @default.
- W17065125 hasConceptScore W17065125C43617362 @default.
- W17065125 hasConceptScore W17065125C57410435 @default.
- W17065125 hasLocation W170651251 @default.
- W17065125 hasOpenAccess W17065125 @default.
- W17065125 hasPrimaryLocation W170651251 @default.
- W17065125 hasRelatedWork W1984258336 @default.
- W17065125 hasRelatedWork W1991883485 @default.
- W17065125 hasRelatedWork W1993149375 @default.
- W17065125 hasRelatedWork W1997773291 @default.
- W17065125 hasRelatedWork W2003186325 @default.
- W17065125 hasRelatedWork W2003326689 @default.
- W17065125 hasRelatedWork W2008746189 @default.
- W17065125 hasRelatedWork W2014836747 @default.
- W17065125 hasRelatedWork W2021560184 @default.
- W17065125 hasRelatedWork W2024063182 @default.
- W17065125 hasRelatedWork W2030342982 @default.
- W17065125 hasRelatedWork W2052000115 @default.
- W17065125 hasRelatedWork W2079555881 @default.
- W17065125 hasRelatedWork W2087309251 @default.
- W17065125 hasRelatedWork W2093035600 @default.
- W17065125 hasRelatedWork W2120376941 @default.
- W17065125 hasRelatedWork W2275875447 @default.
- W17065125 hasRelatedWork W2312252399 @default.
- W17065125 hasRelatedWork W2319666866 @default.
- W17065125 hasRelatedWork W2983774314 @default.
- W17065125 isParatext "false" @default.
- W17065125 isRetracted "false" @default.
- W17065125 magId "17065125" @default.
- W17065125 workType "article" @default.